A Multilevel Integration Approach for E-Finance Portal Development

2008 ◽  
pp. 139-155
Author(s):  
Jia Hu ◽  
Ning Zhong
Keyword(s):  
Integration Approach

Characterization of Unfilled Tungsten Plugs on a 0.35μm CMOS Multilevel Metallization Process

1996 ◽  
Author(s):  
H. Sur ◽  
S. Bothra ◽  
Y. Strunk ◽  
J. Hahn
Keyword(s):  
Process Development ◽  
Process Integration ◽  
Wafer Level ◽  
Electrical Failure ◽  
Analysis Techniques ◽  
Integration Approach ◽  
Intermetal Dielectric ◽  
Metallization Process ◽  
Section Analysis

Abstract An investigation into metallization/interconnect failures during the process development phase of an advanced 0.35μm CMOS ASIC process is presented. The corresponding electrical failure signature was electrical shorting on SRAM test arrays and subsequently functional/Iddq failures on product-like test vehicles. Advanced wafer-level failure analysis techniques and equipment were used to isolate and identify the leakage source as shorting of metal lines due to tungsten (W) residue which was originating from unfilled vias. Further cross-section analysis revealed that the failing vias were all exposed to the intermetal dielectric spin-on glass (SOG) material used for filling the narrow spaces between metal lines. The outgassing of the SOG in the exposed regions of the via prior to and during the tungsten plug deposition is believed to be the cause of the unfilled vias. This analysis facilitated further process development in eliminating the failure mechanism and since then no failures of this nature have been observed. The process integration approach used to eliminate the failure is discussed.

A Path Integration Approach based on M ulti scale Grid Cells for L arge scale N avigation

2021 ◽  
pp. 1-1
Author(s):  
Chuang Yang ◽  
Zhi Xiong ◽  
Jianye Liu ◽  
Lijun Chao ◽  
Yudi Chen
Keyword(s):  
Path Integration ◽  
Grid Cells ◽  
Integration Approach ◽  
Scale Grid

Object-Oriented Application on Data Modelling and Knowledge Representation: A System Integration Approach

1989 ◽  
Vol 4 (4) ◽  
pp. 205-215
Author(s):  
Daniel T. Lee
Keyword(s):  
Knowledge Representation ◽  
System Integration ◽  
Object Oriented ◽  
Integrated Systems ◽  
Data Modelling ◽  
Integration Approach ◽  
Two Systems ◽  
Modelling Techniques ◽  
Modern Knowledge

Traditional data modelling techniques of DSS and modern knowledge representation methodologies of ES are inconsistent. A new unifying model is needed for integrating the two systems into a unified whole. After a brief review of data modelling techniques and knowledge representation methodologies, the unifying model will be described and integrated systems will be used to exemplify the usefulness of the unifying model.

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