Inversion of Surface Acoustic Wave Data to Determine the Elastic Constants of Nitride Films
1998 ◽
Vol 37
(Part 1, No. 5B)
◽
pp. 3116-3119
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Keyword(s):
1993 ◽
Vol 32
(Part 1, No. 5B)
◽
pp. 2367-2368
◽
Keyword(s):
1995 ◽
pp. 1813-1820
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2001 ◽
Vol 84
(5)
◽
pp. 46-54
◽
1998 ◽
Vol 08
(PR9)
◽
pp. Pr9-191-Pr9-194
◽
1981 ◽
Vol 42
(C4)
◽
pp. C4-365-C4-368