Design and evaluation of a micro resonator structure as a biosensor for droplet analysis with a standard fabrication method

Purpose In this work, the sensing and actuating elements are designed with interdigitated capacitors away from the sensitive element on which the droplet is placed. This pattern helps to prevent interference of electrical elements with the droplet. Choosing shear resonance mode at this proposed structure minimizes the damping effect of droplet touch by the resonator structure. The glass-based standard fabrication method of the proposed biosensor is presented exactly. Design/methodology/approach Mechanical resonator sensors are extremely limited because of the high damping factor and the high electrical conductivity in the aqueous environment. In this work, a molecule detector biosensor is proposed for droplet analysis, which is possible to fabricate using micro-electro-mechanical systems (MEMS) technology. By electromechanical coupling of resonators as a mechanical resonator structure, a standing mechanical wave is formed at this structure by electrostatic actuating elements. Findings In this paper, a mechanical resonator structure as a biosensor is proposed for micro-droplet analysis that can be fabricated by MEMS technology. It is designed at a lower cost fabrication method using electrostatic technology and interdigitated capacitors. The response of the biosensor displacement frequency at the resonance frequency of the desired mode is reasonable for measuring the capacitive changes of its output. The mass sensitivity of the proposed biosensor is in the range of 1 ng, and it has a large sensitive area for capturing target molecules. Originality/value To evaluate the quality of the proposed design, the stimulated analysis is conducted by COMSOL and results are presented.

Performance Assessment and Comparison of Two Piezoelectric Energy Harvesters Developed for Pavement Application: Case Study

To advance the development of piezoelectric energy harvesters, this study designed and manufactured bridge-unit-based and pile-unit-based piezoelectric devices. An indoor material testing system and accelerated pavement test equipment were used to test the electrical performance, mechanical performance, and electromechanical coupling performance of the devices. The results showed that the elastic modulus of the pile structure device was relatively higher than that of the bridge structure device. However, the elastic modulus of the two devices should be improved to avoid attenuation in the service performance and fatigue life caused by the stiffness difference. Furthermore, the electromechanical conversion coefficients of the two devices were smaller than 10% and insensitive to the load magnitude and load frequency. Moreover, the two devices can harvest 3.4 mW and 2.6 mW under the wheel load simulated by the one-third scale model mobile load simulator, thus meeting the supply requirements of low-power sensors. The elastic modulus, electromechanical conversion coefficients, and electric performance of the pile structure device were more reliable than those of the bridge structure device, indicating a better application prospect in road engineering.

Onset and stabilization of delay-induced instabilities in piezoelectric digital vibration absorbers

The stability of a piezoelectric structure controlled by a digital vibration absorber emulating a shunt circuit is investigated in this work. The formalism of feedback control theory is used to demonstrate that systems with a low electromechanical coupling are prone to delay-induced instabilities entailed by the sampling procedure of the digital unit. An explicit relation is derived between the effective electromechanical coupling factor and the maximum sampling period guaranteeing a stable controlled system. Since this sampling period may be impractically small, a simple modification procedure of the emulated admittance of the shunt circuit is proposed in order to counteract the effect of delays by anticipation. The theoretical developments are experimentally validated on a clamped-free piezoelectric beam.

Electromechanical Coupling Characteristics Analysis and Research of Rotation-Parallel Flexible Robot Manipulator

RP(Rotation-Parallel) flexible robot as a typical electromechanical system. The complex electromechanical coupling effect in the system has a significant impact on the dynamic characteristics and stability of the flexible manipulator. This article investigates the electromechanical coupling dynamics and vibration response characteristics of flexible robot manipulator driven by AC(Alternating Current) servo motor with considering the start-up dynamic characteristics of the motor. Firstly, the physical model including the coupling of electromagnetic and mechanical system is established, and the dynamic model of the whole system is derived based on the global electromechanical coupling effect and Lagrange-Maxwell equations. Secondly, the virtual simulation platform is constructed with the help of MATLAB/Simulink, and the output speed characteristics of the motor drive end and the motion of the moving base are analyzed. Finally, through the joint simulation of MATLAB/Simulink dynamic simulation model and ADAMS/Controls virtual prototype model, the vibration characteristics of flexible manipulator under electromechanical coupling are obtained. The result demonstrates that the electromechanical coupling effect at the motor driving end has an obvious influence on the dynamic characteristics of the flexible manipulator, which is manifested in the increase of the vibration displacement amplitude of the flexible manipulator. With the increase of motor speed, the change of elastic vibration of flexible manipulator becomes larger, which shows that the electromechanical coupling effect of motor driving end has a greater impact on the dynamic characteristics of flexible manipulator at high speed. The analysis results are of great significance to improve the dynamic performance of motor-driven flexible robot manipulator.

c-Axis-tilted ScAlN films grown on silicon substrates for surface acoustic wave devices

ScAlN films are currently being investigated for their potential use in surface acoustic wave (SAW) devices for next-generation mobile networks because of their high piezoelectricity. This paper describes the numerical simulation of SAW propagation in c-axis-tilted ScAlN films on silicon substrates and a fabrication technique for preparing c-axis-tilted ScAlN films on silicon substrates. The electromechanical coupling coefficient K 2 of SAW propagating in the ScAlN film/silicon substrate increased due to the c-axis tilt angle. The maximum K 2 value is approximately 3.90%. This value is 2.6 times the maximum K 2 value of the c-axis-oriented ScAlN film/silicon substrate structure. The c-axis-tilted ScAlN films with an Sc concentration of 40% were prepared on a silicon substrate via RF magnetron sputtering based on the self-shadowing effect, and the maximum c-axis tilt angle was 57.4°. These results indicate that this device structure has potential for SAW device applications with well-established micromachining technology derived from silicon substrates.

Engineering of atomic-scale flexoelectricity at grain boundaries

Flexoelectricity is a type of ubiquitous and prominent electromechanical coupling, pertaining to the electrical polarization response to mechanical strain gradients that is not restricted by the symmetry of materials. However, large elastic deformation is usually difficult to achieve in most solids, and the strain gradient at minuscule is challenging to control. Here, we exploit the exotic structural inhomogeneity of grain boundary to achieve a huge strain gradient (~1.2 nm−1) within 3–4-unit cells, and thus obtain atomic-scale flexoelectric polarization of up to ~38 μC cm−2 at a 24° LaAlO3 grain boundary. Accompanied by the generation of the nanoscale flexoelectricity, the electronic structures of grain boundaries also become different. Hence, the flexoelectric effect at grain boundaries is essential to understand the electrical activities of oxide ceramics. We further demonstrate that for different materials, altering the misorientation angles of grain boundaries enables tunable strain gradients at the atomic scale. The engineering of grain boundaries thus provides a general and feasible pathway to achieve tunable flexoelectricity.

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

This paper examines a new technique to improve the figure of merit of laterally vibrating RF-MEMS resonators through an energy-preserving suspended addendum frame structure using finite element analysis. The proposed suspended addendum frame on the sides of the resonant plate helps as a mechanical vibration isolator from the supporting substrate. This enables the resonator to have a low acoustic energy loss, resulting in a higher quality factor. The simulated attenuation characteristics of the suspended addendum frame are up to an order of magnitude larger than those achieved with the conventional structure. Even though the deployed technique does not have a significant impact on increasing the effective electromechanical coupling coefficient, due to a gigantic improvement in the unloaded quality factor, from 4106 to 51,136, the resonator with the suspended frame achieved an 11-folds improvement in the figure of merit compared to that of the conventional resonator. Moreover, the insertion loss was improved from 5 dB down to a value as low as 0.7 dB. Furthermore, a method of suppressing spurious mode is demonstrated to remove the one incurred by the reflected waves due to the proposed energy-preserving structure.

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance. One of the key parameters of an FBAR, the effective electromechanical coupling coefficient (Keff2), has a great influence on the bandwidth of RF filters. In this work, we propose a feasible method to tune the Keff2 of the FBAR by etching the piezoelectric material to form a trench around the active area of the FBAR. The influence of the position of the etching trench on the Keff2 of the FBAR was investigated by 3D finite element modeling and experimental fabricating. Meanwhile, a theoretical electrical model was presented to test and verify the simulated and measured results. The Keff2 of the FBAR tended to be reduced when the distance between the edge of the top electrode and the edge of the trench was increased, but the Q value of the FBAR was not degraded. This work provides a new possibility for tuning the Keff2 of resonators to meet the requirements of different filter bandwidths.

Analysis of design parameters of round-window stimulating type electromagnetic transducer by a nonlinear lumped parameter model of implanted human ear

<abstract> <p>Round-window stimulating transducer is a new solution to treat mixed hearing loss. To uncover the factors affecting the round-window stimulation's performance, we investigated the influence of four main design parameters of round-window stimulating type electromagnetic transducer. Firstly, we constructed a human ear nonlinear lumped parameter model and confirmed its validity by comparing the stapes responses predicted by the model with the experimental data. Following this, an electromagnetic transducer's mechanical model, which simulates the floating mass transducer, was built and coupled to the human ear model; thereby, we established a nonlinear lumped parameter model of implanted human ear under round-window stimulation and verified its reliability. Finally, based on this model, the influences of the four main design parameters, i.e., the excitation voltage, the electromechanical coupling coefficient, the support stiffness, and the preload force, were analyzed. The results show that the change of excitation voltage does not alter the system's natural frequency. Chaotic motion occurs when the electromechanical coupling coefficient is small. Meanwhile, the stapes displacement appears to increase firstly and then decrease with the increase of the electromechanical coupling coefficient. The increase of the support stiffness enlarges the resonance frequency of the stapes displacement and reduces the stapes displacement near the resonance frequency, deteriorating the transducer's hearing compensation at low frequency. The preload force can improve the transducer's hearing compensation performance in mid-high frequency region.</p> </abstract>