Synthesis and Micro-Structural Characterization of CrAlN Coatings by Reactive Magnetron Sputtering

Lecture Notes in Mechanical Engineering - Proceedings of International Conference on Advances in Tribology and Engineering Systems ◽

10.1007/978-81-322-1656-8_38 ◽

2013 ◽

pp. 421-430

Author(s):

Hetal N. Shah ◽

R. Jayaganthan

Keyword(s):

Magnetron Sputtering ◽

Structural Characterization ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Optical and structural characterization of Tm2O3, TmN, and TmOxNy thin films grown by direct-current reactive magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2020.138450 ◽

2021 ◽

Vol 717 ◽

pp. 138450

Author(s):

Axel Meeuwissen ◽

Giacomo B.F. Bosco ◽

Erik van der Kolk

Keyword(s):

Magnetron Sputtering ◽

Direct Current ◽

Structural Characterization ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Structural characterization of β-V2O5 films prepared by DC reactive magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2008.11.002 ◽

2009 ◽

Vol 255 (7) ◽

pp. 4177-4179 ◽

Author(s):

Q. Su ◽

W. Lan ◽

Y.Y. Wang ◽

X.Q. Liu

Keyword(s):

Magnetron Sputtering ◽

Structural Characterization ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5060643 ◽

2019 ◽

Vol 37 (2) ◽

pp. 021203 ◽

Author(s):

Jordan Bouaziz ◽

Pedro Rojo Romeo ◽

Nicolas Baboux ◽

Bertrand Vilquin

Keyword(s):

Magnetron Sputtering ◽

Solid Solutions ◽

Zirconium Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Characterization of composite SiOx/polymer films deposited on pet substrates by RF reactive magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2012.02.035 ◽

2013 ◽

Vol 89 ◽

pp. 109-112 ◽

Author(s):

Zhuang Liu ◽

Xinxin Ma ◽

ChunLi Yang ◽

Fangjun Xu

Keyword(s):

Magnetron Sputtering ◽

Polymer Films ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Hardness and structure characterization of films produced by reactive magnetron sputtering on a conventional austenitic stainless steel

Microelectronics Journal ◽

10.1016/j.mejo.2008.01.047 ◽

2008 ◽

Vol 39 (11) ◽

pp. 1329-1330 ◽

Author(s):

Carlos M. Garzón ◽

José E. Alfonso ◽

Edna C. Corredor ◽

Abel A. Recco ◽

André P. Tschiptschin

Keyword(s):

Stainless Steel ◽

Austenitic Stainless Steel ◽

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Structure Characterization ◽

Reactive Magnetron

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Growth and Characterization of Tungsten Oxide Thin Films using the Reactive Magnetron Sputtering System

Journal of Inorganic and Organometallic Polymers and Materials ◽

10.1007/s10904-016-0380-0 ◽

2016 ◽

Vol 26 (4) ◽

pp. 889-894 ◽

Author(s):

S. Firoozbakht ◽

E. Akbarnejad ◽

A. Salar Elahi ◽

M. Ghoranneviss

Keyword(s):

Magnetron Sputtering ◽

Tungsten Oxide ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Oxide Thin Films ◽

Tungsten Oxide Thin Films ◽

Sputtering System

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Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering

Solid State Sciences ◽

10.1016/j.solidstatesciences.2010.11.019 ◽

2011 ◽

Vol 13 (2) ◽

pp. 314-320 ◽

Author(s):

A. Mallikarjuna Reddy ◽

A. Sivasankar Reddy ◽

Kee-Sun Lee ◽

P. Sreedhara Reddy

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Dc Reactive Magnetron Sputtering

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Characterization of titanium nitride films prepared by d.c. reactive magnetron sputtering at different nitrogen pressures

Surface and Coatings Technology ◽

10.1016/s0257-8972(96)03094-0 ◽

1997 ◽

Vol 90 (1-2) ◽

pp. 64-70 ◽

Author(s):

Li-Jian Meng ◽

M.P. dos Santos

Keyword(s):

Magnetron Sputtering ◽

Titanium Nitride ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron

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Microhardness characterization of superlattices formed by reactive magnetron sputtering and ion beam assisted deposition

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00244-x ◽

2002 ◽

Vol 158-159 ◽

pp. 685-689 ◽

Author(s):

E Blando ◽

R Hübler

Keyword(s):

Magnetron Sputtering ◽

Ion Beam ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Ion Beam Assisted Deposition

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Synthesis and characterization of La 2 NiO 4+δ coatings deposited by reactive magnetron sputtering using plasma emission monitoring

Solid State Ionics ◽

10.1016/j.ssi.2014.07.017 ◽

2014 ◽

Vol 265 ◽

pp. 73-79 ◽

Author(s):

J. Fondard ◽

A. Billard ◽

G. Bertrand ◽

P. Briois

Keyword(s):

Magnetron Sputtering ◽

Reactive Magnetron Sputtering ◽

Synthesis And Characterization ◽

Plasma Emission ◽

Reactive Magnetron ◽

Emission Monitoring

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