Characterization of titanium nitride films prepared by d.c. reactive magnetron sputtering at different nitrogen pressures

1997 ◽  
Vol 90 (1-2) ◽  
pp. 64-70 ◽  
Author(s):  
Li-Jian Meng ◽  
M.P. dos Santos
Keyword(s):  
Magnetron Sputtering ◽  
Titanium Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

scholarly journals RETRACTED ARTICLE: Nanocharacterization of Titanium Nitride Thin Films Obtained by Reactive Magnetron Sputtering

JOM ◽  
2015 ◽  
Vol 69 (8) ◽  
pp. 1455-1455
Author(s):  
Violeta Valentina Merie ◽  
Marius Sorin Pustan ◽  
Corina Bîrleanu ◽  
Gavril Negrea
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Titanium Nitride ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Retracted Article

Growth and characterization of NiO thin films prepared by dc reactive magnetron sputtering

2011 ◽  
Vol 13 (2) ◽  
pp. 314-320 ◽  
Author(s):  
A. Mallikarjuna Reddy ◽  
A. Sivasankar Reddy ◽  
Kee-Sun Lee ◽  
P. Sreedhara Reddy
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering
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