Chemical Beam Etching and Epitaxy with Atomic Scale Control and Instant Switching between Etching and Epitaxy
Keyword(s):
2006 ◽
Vol 124
(13)
◽
pp. 131101
◽
Keyword(s):
2004 ◽
Vol 43
(No. 3B)
◽
pp. L386-L389
◽