Computation of Actuation Voltage and Stress Made of Hafnium Oxide Materials Used in Radio Frequency Micro-electromechanical System Switch

2017 ◽  
pp. 93-100
Author(s):  
Ankur Saxena
Keyword(s):  
Radio Frequency ◽  
Hafnium Oxide ◽  
Actuation Voltage ◽  
Electromechanical System ◽  
Oxide Materials ◽  
Materials Used ◽  
Micro Electromechanical System

Design and characterization of a 3D encapsulation with silicon vias for radio frequency micro-electromechanical system resonator

2017 ◽  
Vol 26 (6) ◽  
pp. 060705 ◽  
Author(s):  
Ji-Cong Zhao ◽  
Quan Yuan ◽  
Feng-Xiang Wang ◽  
Xiao Kan ◽  
Guo-Wei Han ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Electromechanical System ◽  
Silicon Vias ◽  
Micro Electromechanical System

A fractal micro-electromechanical system and its pull-in stability

2021 ◽  
pp. 146134842098404
Author(s):  
Dan Tian ◽  
Chun-Hui He
Keyword(s):  
Fractal Model ◽  
Electromechanical System ◽  
Normal Operation ◽  
Fractal Derivative ◽  
Operation Period ◽  
Micro Electromechanical System

Pull-in instability occurs in a micro-electromechanical system, and it greatly hinders its normal operation. A fractal modification is suggested to make the system stable in all operation period. A fractal model is established using a fractal derivative, and the results show that by suitable fabrication of the micro-electromechanical system device, the pull-in instability can be converted into a novel state of pull-in stability.

FERROELECTRICS IN ACOUSTOELECTRONICS

Akustika ◽  
2021 ◽  
pp. 217
Author(s):  
Tamara Patrusheva ◽  
Sergey Petrov ◽  
Ludmila Drozdova ◽  
Aleksandr Shashurin
Keyword(s):  
Dielectric Constant ◽  
Electric Fields ◽  
Piezoelectric Effect ◽  
Complex Oxide ◽  
Ferroelectric Materials ◽  
Oxide Materials ◽  
Ferroelectric Films ◽  
Synthesis Time ◽  
Resonance Effects ◽  
Materials Used

Аcoustoelectronics is one of the areas of acoustics, associated with the use of mechanical resonance effects and the piezoelectric effect, as well as the effect based on the interaction of electric fields with waves of acoustic stresses in a piezoelectric material. The main materials used in acoustoelectronics are ferroelectrics, which are mainly complex oxide materials. This article discusses the possibility of increasing the purity and homogeneity of ferroelectric materials, as well as softening the regimes of their synthesis using the solution extraction-pyrolytic method. It is shown that the synthesis temperatures of BaTiO3, SrTiO3, and Pb(Zr)TiO3 ferroelectric films are reduced to 550-600°C, and the synthesis time is down to 5-10 minutes. The dielectric constant and Curie temperature values correspond to the maximum characteristics for these materials. Thus, using the extraction-pyrolytic method we obtained suitable for use in acoustoelectronic technology ferroelectric films.

Fabrication of a Micro-Electromechanical System-Based Acetone Gas Sensor Using CeO2 Nanodot-Decorated WO3 Nanowires

2020 ◽  
Vol 12 (12) ◽  
pp. 14095-14104 ◽  
Author(s):  
Kaiping Yuan ◽  
Cheng-Yu Wang ◽  
Li-Yuan Zhu ◽  
Qi Cao ◽  
Jia-He Yang ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Electromechanical System ◽  
Micro Electromechanical System

A bionic micro-electromechanical system piezo-resistive vector hydrophone that suppresses vibration noise

2019 ◽  
Vol 29 (11) ◽  
pp. 115007
Author(s):  
Jinlong Song ◽  
Renxin Wang ◽  
Guojun Zhang ◽  
Zhenzhen Shang ◽  
Lansheng Zhang ◽  
...  
Keyword(s):  
Electromechanical System ◽  
Vector Hydrophone ◽  
Micro Electromechanical System ◽  
Vibration Noise
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