Influence of diffusion of the electron energy distribution function in a low-temperature microwave discharge plasma

Radiophysics and Quantum Electronics ◽

10.1007/bf01039676 ◽

1989 ◽

Vol 32 (2) ◽

pp. 184-189

Author(s):

N. A. Dyatko ◽

I. V. Kochetov ◽

A. P. Napartovich

Keyword(s):

Distribution Function ◽

Low Temperature ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Journal of Applied Physics ◽

10.1063/1.353193 ◽

1993 ◽

Vol 73 (4) ◽

pp. 1612-1616 ◽

Author(s):

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Chihiro Komatsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Radio Frequency Discharge

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Effect of Electron Energy Distribution Function on Spectroscopic Characteristics of Microwave Discharge Argon Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.5432 ◽

2002 ◽

Vol 41 (Part 1, No. 8) ◽

pp. 5432-5441 ◽

Author(s):

Ryouji Kashiwazaki ◽

Hiroshi Akatsuka

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Spectroscopic Characteristics

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On the Question of Increasing Maxwellization of the Electron Energy Distribution Function due to Electron — Electron Interaction with Growing Ionization Degree in the Beam Discharge Plasma

Beiträge aus der Plasmaphysik ◽

10.1002/ctpp.19830230303 ◽

1983 ◽

Vol 23 (3) ◽

pp. 219-228 ◽

Author(s):

R. Winkler ◽

J. Wilhelm

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Interaction ◽

Electron Energy Distribution ◽

Ionization Degree

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Measurement of Electron Energy Distribution Function in a Low-Pressure rf Discharge Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.1503 ◽

1992 ◽

Vol 31 (Part 1, No. 5A) ◽

pp. 1503-1504 ◽

Author(s):

Shinya Yagura ◽

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Low Pressure ◽

Energy Distribution Function ◽

Rf Discharge ◽

Electron Energy Distribution

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Electron energy distribution function in a microwave discharge created by propagating surface waves

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/27/2/019 ◽

1994 ◽

Vol 27 (2) ◽

pp. 301-311 ◽

Author(s):

U Kortshagen ◽

A Shivarova ◽

E Tatarova ◽

D Zamfirov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Surface Waves ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Non-Maxwellian electron energy distribution function in He, He/Ar, He/Xe/H2 and He/Xe/D2 low temperature afterglow plasma

The European Physical Journal D ◽

10.1140/epjd/e2009-00144-3 ◽

2009 ◽

Vol 54 (2) ◽

pp. 391-398 ◽

Author(s):

R. Plasil ◽

I. Korolov ◽

T. Kotrik ◽

P. Dohnal ◽

G. Bano ◽

...

Keyword(s):

Distribution Function ◽

Low Temperature ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Afterglow Plasma

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Electron energy distribution function in a Hall discharge plasma

10.2514/6.2001-3326 ◽

2001 ◽

Author(s):

N. Meezan ◽

M. Cappelli

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Variations in the electron energy distribution function in discharge plasma of a unipolar gas breakdown

Moscow University Physics Bulletin ◽

10.3103/s0027134909050130 ◽

2009 ◽

Vol 64 (5) ◽

pp. 532-535 ◽

Author(s):

V. P. Savinov ◽

A. K. Sukhov ◽

T. P. Kopeikina

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

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Radial profile of the electron energy distribution function in RF capacitive gas-discharge plasma

Journal of Physics Conference Series ◽

10.1088/1742-6596/700/1/012007 ◽

2016 ◽

Vol 700 ◽

pp. 012007

Author(s):

M Dimitrova ◽

Tsv Popov ◽

N Puac ◽

N Skoro ◽

K Spasic ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Radial Profile ◽

Gas Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Gas Discharge Plasma

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A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/28/7/012 ◽

1995 ◽

Vol 28 (7) ◽

pp. 1354-1361 ◽

Author(s):

E Tatarova ◽

D Zamfirov

Keyword(s):

Experimental Investigation ◽

Distribution Function ◽

Energy Distribution ◽

Surface Waves ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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