Electron energy distribution function in a microwave discharge created by propagating surface waves
1994 ◽
Vol 27
(2)
◽
pp. 301-311
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1995 ◽
Vol 28
(7)
◽
pp. 1354-1361
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2002 ◽
Vol 41
(Part 1, No. 8)
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pp. 5432-5441
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1994 ◽
Vol 3
(4)
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pp. 545-555
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1977 ◽
Vol 27
(9)
◽
pp. 1027-1033
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1985 ◽
Vol 18
(3)
◽
pp. 347-358
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2003 ◽
Vol 42
(Part 1, No. 2A)
◽
pp. 657-662
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