Electron energy distribution function in a microwave discharge created by propagating surface waves

1994 ◽  
Vol 27 (2) ◽  
pp. 301-311 ◽  
Author(s):  
U Kortshagen ◽  
A Shivarova ◽  
E Tatarova ◽  
D Zamfirov
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

Sign in / Sign up

Export Citation Format

Share Document