Effect of Electron Energy Distribution Function on Spectroscopic Characteristics of Microwave Discharge Argon Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.5432 ◽

2002 ◽

Vol 41 (Part 1, No. 8) ◽

pp. 5432-5441 ◽

Author(s):

Ryouji Kashiwazaki ◽

Hiroshi Akatsuka

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Spectroscopic Characteristics

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Electron energy distribution function in the collisional-radiative model of an argon plasma

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/18/3/005 ◽

1985 ◽

Vol 18 (3) ◽

pp. 347-358 ◽

Author(s):

J Vlcek ◽

V Pelikan

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Collisional Radiative Model ◽

Radiative Model

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Influence of diffusion of the electron energy distribution function in a low-temperature microwave discharge plasma

Radiophysics and Quantum Electronics ◽

10.1007/bf01039676 ◽

1989 ◽

Vol 32 (2) ◽

pp. 184-189

Author(s):

N. A. Dyatko ◽

I. V. Kochetov ◽

A. P. Napartovich

Keyword(s):

Distribution Function ◽

Low Temperature ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Theoretical study on the electron energy distribution function and electron transport parameters of argon plasma

10.1117/12.2182243 ◽

2015 ◽

Author(s):

Yachun Zhang ◽

Xiang He ◽

Jianping Chen ◽

Jian Lu ◽

Xiaowu Ni ◽

...

Keyword(s):

Distribution Function ◽

Electron Transport ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Theoretical Study ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Transport Parameters

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Electron energy distribution function in a microwave discharge created by propagating surface waves

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/27/2/019 ◽

1994 ◽

Vol 27 (2) ◽

pp. 301-311 ◽

Author(s):

U Kortshagen ◽

A Shivarova ◽

E Tatarova ◽

D Zamfirov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Surface Waves ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Electron energy distribution function in a moderately ionized argon plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/10/2/303 ◽

2001 ◽

Vol 10 (2) ◽

pp. 134-146 ◽

Author(s):

A A Matveyev ◽

V P Silakov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution

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ELECTRON ENERGY DISTRIBUTION FUNCTION AND ATOM IONIZATION PROCESSES IN HIGH FREQUENCY DISCHARGE MERCURY-ARGON PLASMA

Le Journal de Physique Colloques ◽

10.1051/jphyscol:19797103 ◽

1979 ◽

Vol 40 (C7) ◽

pp. C7-209-C7-210

Author(s):

S. D. Wagner ◽

I. S. Nisconen

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

High Frequency ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Ionization Processes ◽

Atom Ionization

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Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/4/320 ◽

2002 ◽

Vol 11 (4) ◽

pp. 525-543 ◽

Author(s):

V A Godyak ◽

R B Piejak ◽

B M Alexandrovich

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Inductively Coupled

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Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma

Thin Solid Films ◽

10.1016/j.tsf.2011.01.218 ◽

2011 ◽

Vol 519 (20) ◽

pp. 7009-7013 ◽

Author(s):

Hyo-Chang Lee ◽

Jin-Young Bang ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/28/7/012 ◽

1995 ◽

Vol 28 (7) ◽

pp. 1354-1361 ◽

Author(s):

E Tatarova ◽

D Zamfirov

Keyword(s):

Experimental Investigation ◽

Distribution Function ◽

Energy Distribution ◽

Surface Waves ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Microwave Discharge ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Apparatus for the electron energy distribution function measurement in the afterglow discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01589560 ◽

1977 ◽

Vol 27 (9) ◽

pp. 1027-1033 ◽

Author(s):

M. Tichý

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Function Measurement

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