A radially resolved experimental investigation of the electron energy distribution function in a microwave discharge sustained by propagating surface waves
1995 ◽
Vol 28
(7)
◽
pp. 1354-1361
◽
1994 ◽
Vol 27
(2)
◽
pp. 301-311
◽
2002 ◽
Vol 41
(Part 1, No. 8)
◽
pp. 5432-5441
◽
1994 ◽
Vol 3
(4)
◽
pp. 545-555
◽
2019 ◽
Vol 52
(24)
◽
pp. 245202
◽
1977 ◽
Vol 27
(9)
◽
pp. 1027-1033
◽
1985 ◽
Vol 18
(3)
◽
pp. 347-358
◽
2003 ◽
Vol 42
(Part 1, No. 2A)
◽
pp. 657-662
◽