A mass spectrometric analysis of CF4/O2 plasmas: Effect of oxygen concentration and plasma power
1990 ◽
Vol 10
(2)
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pp. 261-275
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2015 ◽
Vol 60
(6)
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pp. 511-520
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2002 ◽
Vol 75
(3)
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pp. 316
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Keyword(s):
2014 ◽
Vol 406
(28)
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pp. 7275-7286
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