Crystallization behavior of SiO2−TiO2 sol-gel thin films

1997 ◽  
Vol 8 (1-3) ◽  
pp. 409-413 ◽  
Author(s):  
Rui M. Almeida ◽  
Eva E. Christensen

1994 ◽  
Vol 346 ◽  
Author(s):  
M.C. Gust ◽  
L.A. Momoda ◽  
M.L. Mecartney

ABSTRACTThin films of BaTiO3 were prepared by the sol-gel route using barium titanium methoxypropoxide in methoxypropanol. Sols with water of hydrolysis varying between h=0 and h=2 were spun onto (100) Si and Ge coated (100) Si substrates. XRD and analytical TEM were used to study the microstructure and crystallization behavior of these films. Polycrystalline BaTiO3 was obtained by heat treating the films at temperatures between 600 and 750°C using either conventional furnace annealing or rapid thermal annealing. Films prepared from sols having the highest water content tended to crystallize first. The BaTiO3 thin films exhibited a fine grain size on the order of 25–50 nm. No preferred orientation was observed. The effects of the hydrolysis conditions of the sol, the type of heat treatment, and the choice of substrate on the final microstructure of the films are discussed.



1991 ◽  
Vol 224 ◽  
Author(s):  
Zheng Wu ◽  
Roberto Pascual ◽  
C.V.R. Vasant Kumar ◽  
David Amd ◽  
Michael Sayer

AbstractThe preparation of ferroelectric lead zirconate titanate (PZT) thin films by rapid thermal processing (RTP) is reported. The films were deposited by chemical sol gel and physical sputter techniques. The heating rate of RTP was found to have significant influence on the crystallization behavior. Faster heating rates lead to lowering of the crystallization temperature and reduction of grain size. PZT films were obtained with dielectric constants ~ 1000, remanent polarizations between 20 and 30μC/cm2, coercive fields 20 to 60kV/cm, and no significant fatigue for 109 to 1010 stressing cycles.



2011 ◽  
Vol 176 (9) ◽  
pp. 716-722 ◽  
Author(s):  
Enrico Della Gaspera ◽  
Mattia Pujatti ◽  
Massimo Guglielmi ◽  
Michael L. Post ◽  
Alessandro Martucci


2002 ◽  
Vol 270 (1) ◽  
pp. 33-38 ◽  
Author(s):  
Dong Gun Lee ◽  
Hae Wook Lee ◽  
Hee Young Lee ◽  
Jeong-Joo Kim ◽  
Sang-Hee Cho


2011 ◽  
Vol 115 (7) ◽  
pp. 3115-3122 ◽  
Author(s):  
Benjamin Louis ◽  
Natacha Krins ◽  
Marco Faustini ◽  
David Grosso
Keyword(s):  
Sol Gel ◽  


1990 ◽  
Vol 180 ◽  
Author(s):  
J.L. Keddie ◽  
E.P. Giannelis

ABSTRACTBackscattering spectrometry has been used to determine the density of TiO2 sol-gel films. The density of the as-deposited films relative to that of anatase varies slightly with respect to deposition conditions and is approximately 0.5. Annealing at temperatures as high as 750°C increases the relative density to 0.7 with concomitant decreases in the O:Ti ratio and H content but it does not result in complete densification. Film densities are consistently higher for films annealed under dynamic vacuum compared to those in air.



2020 ◽  
Vol 59 (25) ◽  
pp. 7720
Author(s):  
F. M. Fardo ◽  
R. S. Ribeiro ◽  
J. A. Strauss ◽  
J. Nardi ◽  
L. C. Ferreira ◽  
...  




2010 ◽  
Vol 356 (37-40) ◽  
pp. 2042-2048 ◽  
Author(s):  
D. Joskowska ◽  
K. Pomoni ◽  
A. Vomvas ◽  
B. Kościelska ◽  
D.L. Anastassopoulos
Keyword(s):  
Sol Gel ◽  


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