Structure and electrical properties of a-C∶H films deposited from CH4 decomposition in a low frequency discharge
2011 ◽
Vol 8
(1)
◽
pp. 1-9
◽
Keyword(s):
Keyword(s):
2008 ◽
Vol 112
(48)
◽
pp. 15382-15390
◽
2000 ◽
Vol 47
(5)
◽
pp. 1107-1112
◽
Keyword(s):
2010 ◽
Vol 114
(18)
◽
pp. 6065-6073
◽