High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation

1999 ◽  
Vol 69 (S1) ◽  
pp. S1-S6 ◽  
Author(s):  
S. Lazare ◽  
J. Lopez ◽  
F. Weisbuch
Keyword(s):  
Laser Radiation ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Polymeric Materials ◽  
Krf Laser

High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation

1999 ◽  
Vol 69 (7) ◽  
pp. S1-S6 ◽  
Author(s):  
S. Lazare ◽  
J. Lopez ◽  
F. Weisbuch
Keyword(s):  
Laser Radiation ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Polymeric Materials ◽  
Krf Laser

High-Aspect-Ratio Laser-Fusion Targets Driven by 24-Beam uv Laser Radiation

1986 ◽  
Vol 56 (19) ◽  
pp. 2048-2051 ◽  
Author(s):  
M. C. Richardson ◽  
P. W. McKenty ◽  
R. L. Keck ◽  
F. J. Marshall ◽  
D. M. Roback ◽  
...  
Keyword(s):  
Laser Radiation ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Laser Fusion ◽  
Uv Laser

High-Aspect Ratio Planarization using Self-Leveling Materials

2012 ◽  
Vol 2012 (DPC) ◽  
pp. 002567-002586
Author(s):  
Michelle Fowler ◽  
Dongshun Bai ◽  
Curt Planje ◽  
Xie Shao
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Process Development ◽  
Polymeric Materials ◽  
Polymeric Coating ◽  
Flat Panel Displays ◽  
New Materials ◽  
Coating Materials ◽  
3D Ics ◽  
Microelectronics Industry

There are an increasing number of applications in the microelectronics industry that require materials that can fill and planarize high-aspect ratio topography. These applications call for the formation of a flat coating surface without the use of high bake temperatures or high-pressure processes. Potential device markets include MEMS, 3D-ICs, LEDs, semiconductors, flat panel displays and related microelectronic and optoelectronic devices. Various polymeric coating materials have been developed that have intrinsic self-leveling properties and are able to fill deep trenches and holes found on microelectronic substrates without forming voids. These new materials are able to reflow at modest baking temperatures (50–100 °C) and can fill high-aspect ratio features (10:1) by spin coating single or multiple layers of material over the topography. Several of these polymeric materials remain soluble in TMAH (and other aqueous bases), some are photosensitive, and all materials are compatible with industry-accepted solvents. Results from extended process development work on self-leveling polymeric materials will be discussed and comparisons made to industry-accepted practices.

PHASE CONJUGATION OF KrF LASER RADIATION

1983 ◽  
Vol 44 (C2) ◽  
pp. C2-19-C2-25
Author(s):  
M. C. Gower ◽  
R. G. Caro
Keyword(s):  
Laser Radiation ◽  
Phase Conjugation ◽  
Krf Laser

HEAT TRANSFER IN A FLAT CHANNEL WITH HIGH ASPECT RATIO AT A HEAT CARRIER FLOW WITH LOW-PRANDTL NUMBER

2018 ◽  
Author(s):  
Viktor S. Naumkin ◽  
O.V. Vitovsky ◽  
Maksim S. Makarov ◽  
V. E. Nakoryakov
Keyword(s):  
Heat Transfer ◽  
Aspect Ratio ◽  
Prandtl Number ◽  
Heat Carrier ◽  
High Aspect Ratio ◽  
Flat Channel ◽  
Carrier Flow
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