Alternative method of wavelength drift free dual-wavelength heterodyne interferometry for the absolute distance measurement

2009 ◽  
Vol 16 (4) ◽  
pp. 492-494
Author(s):  
Kun-Huang Chen ◽  
Jing-Heng Chen ◽  
Chi-Chang Wu ◽  
Wei-Yao Chang
2020 ◽  
Vol 238 ◽  
pp. 06011
Author(s):  
Jan Spichtinger ◽  
Michael Schulz ◽  
Gerd Ehret

We are developing a form measurement system for the surfaces of freeform optics and large conventional optics. The specifications of the optics are diameters up to 1.5 m and radii of curvature down to 10 m. This includes optics like telescope mirror segments and synchrotron optics. Using a Fizeau interferometer, we propose a subaperture stitching method that involves vertically aligning the interferometer’s optical axis to the local surface gradient and measuring the absolute distance from the interferometer’s reference flat to the specimen. Experimental results for the absolute distance measurement are shown.


2009 ◽  
Vol 282 (9) ◽  
pp. 1837-1840 ◽  
Author(s):  
Kun-Huang Chen ◽  
Jing-Heng Chen ◽  
Shen-Hua Lu ◽  
Wei-Yao Chang ◽  
Chi-Chang Wu

2016 ◽  
Vol 55 (15) ◽  
pp. 4210 ◽  
Author(s):  
Hanzhong Wu ◽  
Fumin Zhang ◽  
Tingyang Liu ◽  
Petr Balling ◽  
Xinghua Qu

2018 ◽  
Vol 43 (4) ◽  
pp. 807 ◽  
Author(s):  
Xianyu Zhao ◽  
Xinghua Qu ◽  
Fumin Zhang ◽  
Yuhang Zhao ◽  
Guoqing Tang

2017 ◽  
Vol 9 (6) ◽  
pp. 1-8 ◽  
Author(s):  
Baike Lin ◽  
Xin Zhao ◽  
Mingzhao He ◽  
Yingling Pan ◽  
Jie Chen ◽  
...  

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