Development and Study of the Properties of Impact-Resistant Ceramic Nanocomposite Coatings for Silicon
2013 ◽
Vol 39
(5)
◽
pp. 5639-5650
◽
2014 ◽
Vol 43
◽
pp. 76-85
◽
2019 ◽
Vol 45
(17)
◽
pp. 21835-21842
◽
2012 ◽
Vol 90
(4)
◽
pp. 215-224
◽
2003 ◽
Vol 163-164
◽
pp. 251-259
◽
2012 ◽
Vol 365
(1)
◽
pp. 163-171
◽