Improving Anti-Reflection MgF2 Thin Films by Laser Shock Peening and Investigation of its Laser Damage Threshold

2015 ◽  
Vol 82 (1) ◽  
pp. 58-62 ◽  
Author(s):  
M. H. Maleki ◽  
H. R. Dizaji ◽  
A. Ghorbani
Keyword(s):  
Thin Films ◽  
Damage Threshold ◽  
Laser Shock Peening ◽  
Laser Damage Threshold ◽  
Laser Damage ◽  
Laser Shock ◽  
Shock Peening

Optical properties and laser damage threshold of HfO2–SiO2 mixed composite thin films

2014 ◽  
Vol 53 (5) ◽  
pp. 850 ◽  
Author(s):  
Shuvendu Jena ◽  
Raj Bahadur Tokas ◽  
Nitin M. Kamble ◽  
Sudhakar Thakur ◽  
Naba Kishore Sahoo
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Damage Threshold ◽  
Laser Damage Threshold ◽  
Laser Damage ◽  
Composite Thin Films

Microscale Laser Shock Peening of Thin Films, Part 1: Experiment, Modeling and Simulation

2004 ◽  
Vol 126 (1) ◽  
pp. 10-17 ◽  
Author(s):  
Wenwu Zhang ◽  
Y. Lawrence Yao ◽  
I. C. Noyan
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Silicon Substrate ◽  
Metal Film ◽  
Shock Pressure ◽  
Laser Shock Peening ◽  
Laser Shock ◽  
Stress Strain ◽  
Laser Shock Processing ◽  
Shock Peening

Microscale Laser Shock Peening (LSP), also known as Laser Shock Processing, is a technique that can be potentially applied to manipulate residual stress distributions in metal film structures and thus improve the fatigue performances of micro-devices made of such films. In this study, microscale LSP of copper films on single crystal silicon substrate is investigated. Before and after-process curvature measurement verifies that sizable compressive residual stress can be induced in copper thin films using microscale LSP. Improved modeling work of shock pressure is summarized and the computed shock pressure is used as loading in 3D stress/strain analysis of the layered film structure. Simulation shows that the stress/strain distribution in the metal film is close to equi-biaxial and is coupled into the silicon substrate.

Microscale Laser Shock Peening of Thin Films, Part 2: High Spatial Resolution Material Characterization

2004 ◽  
Vol 126 (1) ◽  
pp. 18-24 ◽  
Author(s):  
Wenwu Zhang ◽  
Y. Lawrence Yao ◽  
I. C. Noyan
Keyword(s):  
Thin Films ◽  
Spatial Resolution ◽  
Strain Field ◽  
High Spatial Resolution ◽  
Laser Shock Peening ◽  
Laser Shock ◽  
Stress Strain ◽  
Crystal Silicon ◽  
X Ray ◽  
Shock Peening

Microscale Laser Shock Peening (LSP) is a technique that can be potentially applied to manipulate the residual stress distributions in metal film structures and thus improve the reliability of micro-devices. This paper reports high-spatial-resolution characterization of shock treated copper thin films on single-crystal silicon substrates, where scanning x-ray microtopography is used to map the relative variation of the stress/strain field with micron spatial resolution, and instrumented nanoindentation is applied to measure the distribution of hardness and deduce the sign of the stress/strain field. The measurement results are also compared with 3-D simulation results. The general trends in simulations agree with those from experimental measurements. Simulations and experiments show that there is a near linear correlation between strain energy density at the film-substrate interface and the X-ray diffraction intensity contrast.

Microstructure of thin films: correlation with laser damage threshold

2001 ◽  
Author(s):  
Jerzy Ciosek ◽  
Wojciech Paszkowicz ◽  
Piotr Pankowski ◽  
Jerzy B. Pelka ◽  
Lech T. Baczewski ◽  
...  
Keyword(s):  
Thin Films ◽  
Damage Threshold ◽  
Laser Damage Threshold ◽  
Laser Damage

Local structural investigation of refractory oxide thin films near laser damage threshold

2019 ◽  
Vol 112 ◽  
pp. 245-254
Author(s):  
S. Maidul Haque ◽  
Rajnarayan De ◽  
S. Tripathi ◽  
C. Mukherjee ◽  
S.N. Jha ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Investigation ◽  
Damage Threshold ◽  
Laser Damage Threshold ◽  
Laser Damage ◽  
Refractory Oxide ◽  
Oxide Thin Films

Laser-damage threshold studies and microstructural analysis of amorphous germanium thin films

1995 ◽  
Vol 14 (1) ◽  
pp. 74-76
Author(s):  
N. Balasundaram ◽  
D. Mangalaraj ◽  
Sa. K. Narayandass ◽  
C. Balasubramanian
Keyword(s):  
Thin Films ◽  
Microstructural Analysis ◽  
Damage Threshold ◽  
Laser Damage Threshold ◽  
Laser Damage ◽  
Amorphous Germanium

Effects of oxygen partial pressure on packing density and laser damage threshold of TiO2 thin films

2007 ◽  
Vol 102 (6) ◽  
pp. 063105 ◽  
Author(s):  
Jianke Yao ◽  
Zhengxiu Fan ◽  
Yunxia Jin ◽  
Yuanan Zhao ◽  
Hongbo He ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Packing Density ◽  
Damage Threshold ◽  
Laser Damage Threshold ◽  
Laser Damage ◽  
Tio2 Thin Films

Response of thin films and substrate to micro scale laser shock peening

2004 ◽  
Author(s):  
Youneng Wang ◽  
Hongqiang Chen ◽  
Jeffrey W. Kysar ◽  
Y. Lawrence Yao
Keyword(s):  
Thin Films ◽  
Laser Shock Peening ◽  
Laser Shock ◽  
Micro Scale ◽  
Shock Peening
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