scholarly journals Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy

2012 ◽  
Vol 52 (9) ◽  
pp. 1341-1353 ◽  
Author(s):  
L. Starman ◽  
R. Coutu
Author(s):  
T. Schaffus ◽  
H. Pfaff ◽  
P. Albert ◽  
M. Schaffus ◽  
F. Kroninger ◽  
...  

Abstract The given project is to benchmark typical preparation methods under the aspect of the influence of initial intrinsic stresses inside electric components. Raman spectroscopy has been applied as well as the piezo resistive readout on a specifically designed model stress monitoring chip.


2005 ◽  
Vol 126 ◽  
pp. 101-105 ◽  
Author(s):  
B. Moulin ◽  
L. Hennet ◽  
D. Thiaudière ◽  
P. Melin ◽  
P. Simon

1965 ◽  
Vol 26 (11) ◽  
pp. 620-626 ◽  
Author(s):  
J.P. Russell
Keyword(s):  

1981 ◽  
Vol 42 (C6) ◽  
pp. C6-776-C6-778
Author(s):  
E. Cazzanelli ◽  
A. Fontana ◽  
G. Mariotto ◽  
F. Rocca ◽  
M. P. Fontana

1983 ◽  
Vol 44 (C10) ◽  
pp. C10-501-C10-503 ◽  
Author(s):  
J. D. Swalen ◽  
J. F. Rabolt

1987 ◽  
Vol 48 (C7) ◽  
pp. C7-761-C7-762
Author(s):  
B. LAVOREL ◽  
G. MILLOT ◽  
R. SAINT-LOUP ◽  
M. L. GONZE ◽  
J. SANTOS ◽  
...  

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