Flow Behaviors and Processing Maps of NiTi Shape Memory Alloy with Microstructural Observations on Austenite Phase during Hot Compression

2020 ◽  
Vol 29 (10) ◽  
pp. 6931-6939
Author(s):  
Chaojun Li ◽  
Jiao Luo ◽  
Miaoquan Li
2013 ◽  
Vol 51 ◽  
pp. 103-121 ◽  
Author(s):  
O. Benafan ◽  
R.D. Noebe ◽  
S.A. Padula ◽  
A. Garg ◽  
B. Clausen ◽  
...  

2020 ◽  
Vol 100 (11) ◽  
pp. 542-554
Author(s):  
Ge Zhou ◽  
Xuemei Yu ◽  
Jianlin Li ◽  
Lirong Liu ◽  
Lijia Chen ◽  
...  

Author(s):  
Cory R. Knick ◽  
Christopher J. Morris

In this work we discuss the design and fabrication of a cantilever that may be actuated by utilizing the martensite to austenite phase transformation of a sputtered thin film of equiatomic NiTi shape memory alloy (SMA). The cantilever devices were fabricated on a silicon wafer using standard micro fabrication techniques, and may therefore be applicable to microelectromechanical systems (MEMS) switch or actuator applications. This paper details the development of a co-sputtering process to yield a SMA film with controllable composition of Ni50Ti50 and transformation temperature around 60° C. Shape memory effects were characterized using Differential Scanning Calorimetry (DSC), for which we demonstrated martensite-austenite phase change at 57° C for 1–3 um films, annealed at 600° C. We used wafer stress versus temperature measurements as additional confirmation for the repeatable measurement of reversible phase transformation peaking at 73° C upon heating. Up to 62 MPa was available for actuation during the thermally induced phase change. After exploring multiple approaches to a frontside wafer release process, we were successful in patterning and fabricating 10 um wide freestanding Ni50Ti50 cantilevers.


2017 ◽  
Vol 700 ◽  
pp. 132-139 ◽  
Author(s):  
Chuanliang Shen ◽  
Zhipeng Wu ◽  
Zhenhai Gao ◽  
Xiaoyu Ma ◽  
Shengtong Qiu ◽  
...  

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