Effects of discharge power on the structural and optical properties of TGZO thin films prepared by RF magnetron sputtering technique

Optoelectronics Letters ◽

10.1007/s11801-016-5265-5 ◽

2016 ◽

Vol 12 (3) ◽

pp. 188-191

Author(s):

Jin-hua Gu ◽

Zhou Lu ◽

Zhi-you Zhong ◽

Lu Long ◽

Hao Long

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Discharge Power ◽

Structural And Optical Properties

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Effect of substrate temperature on structural and optical properties of nanostructured ZnO thin films grown by RF magnetron sputtering

International Conference on Nanoscience, Engineering and Technology (ICONSET 2011) ◽

10.1109/iconset.2011.6167911 ◽

2011 ◽

Author(s):

G. Anil Kumar ◽

M. V. Ramana Reddy ◽

Katta Narasimha Reddy

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Structural and Optical properties of ZnO thin films grown on various substrates by RF magnetron sputtering

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/73/1/012133 ◽

2015 ◽

Vol 73 ◽

pp. 012133 ◽

Author(s):

G Anil Kumar ◽

M V Ramana Reddy ◽

Katta Narasimha Reddy

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Structural and optical properties of Nb-doped β-Ga2O3 thin films deposited by RF magnetron sputtering

Vacuum ◽

10.1016/j.vacuum.2017.09.033 ◽

2017 ◽

Vol 146 ◽

pp. 93-96 ◽

Author(s):

Hao Zhang ◽

Jinxiang Deng ◽

Zhiwei Pan ◽

Zhiying Bai ◽

Le Kong ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Structural And Optical Properties

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Evolution of structural and optical properties of photocatalytic Fe doped TiO2 thin films prepared by RF magnetron sputtering

10.1063/1.4861987 ◽

2014 ◽

Author(s):

Prabitha B. Nair ◽

L. V. Maneeshya ◽

V. B. Justinvictor ◽

Georgi P. Daniel ◽

K. Joy ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Structural And Optical Properties ◽

Tio2 Thin Films ◽

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Oxygen Effect on Structural and Optical Properties of ZnO Thin Films Deposited by RF Magnetron Sputtering

Materials Research ◽

10.1590/1980-5373-mr-2016-0478 ◽

2017 ◽

Vol 20 (3) ◽

pp. 607-612 ◽

Author(s):

Bassam Abdallah ◽

Abdul Kader Jazmati ◽

Raeda Refaai

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Oxygen Effect ◽

Structural And Optical Properties

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Structural and optical properties of gold-incorporated diamond-like carbon thin films deposited by RF magnetron sputtering

Materials Research Express ◽

10.1088/2053-1591/aa7430 ◽

2017 ◽

Vol 4 (7) ◽

pp. 076403 ◽

Author(s):

Shahbaz Majeed ◽

K Siraj ◽

S Naseem ◽

Muhammad F Khan ◽

M Irshad ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Diamond Like Carbon ◽

Structural And Optical Properties ◽

Carbon Thin Films

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Erratum: “Effects of low-temperature-buffer, rf-power, and annealing on structural and optical properties of ZnO/Al2O3(0001) thin films grown by rf-magnetron sputtering” [J. Appl. Phys. 106, 023511 (2009)]

Journal of Applied Physics ◽

10.1063/1.3238261 ◽

2009 ◽

Vol 106 (6) ◽

pp. 069901 ◽

Author(s):

H. F. Liu ◽

S. J. Chua

Keyword(s):

Optical Properties ◽

Low Temperature ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Rf Power ◽

Structural And Optical Properties

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Structural and Optical Properties of ZnO Thin Films Grown on SiO2/Si(100) Substrates by RF Magnetron Sputtering

Korean Journal of Materials Research ◽

10.3740/mrsk.2006.16.6.360 ◽

2006 ◽

Vol 16 (6) ◽

pp. 360-366 ◽

Author(s):

Seok Kyu Han ◽

Soon-Ku Hong ◽

Hyo-Jin Kim ◽

Jae-Wook Lee ◽

Jeong-Yong Lee

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties

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Influence of N 2 introduction on structural and optical properties of V-doped ZnO thin films grown by low-temperature reactive RF magnetron sputtering

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2016.12.013 ◽

2017 ◽

Vol 70 ◽

pp. 223-228 ◽

Author(s):

Tomoya Suzuki ◽

Hiroshi Chiba ◽

Akihiro Watanabe ◽

Tomoyuki Kawashima ◽

Katsuyoshi Washio

Keyword(s):

Optical Properties ◽

Low Temperature ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Structural And Optical Properties ◽

Doped Zno ◽

Reactive Rf Magnetron Sputtering

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Effects of low-temperature-buffer, rf-power, and annealing on structural and optical properties of ZnO/Al2O3(0001) thin films grown by rf-magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.3176497 ◽

2009 ◽

Vol 106 (2) ◽

pp. 023511 ◽

Author(s):

H. F. Liu ◽

S. J. Chua

Keyword(s):

Optical Properties ◽

Low Temperature ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Rf Power ◽

Structural And Optical Properties

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