Structural and optical properties of Nb-doped β-Ga2O3 thin films deposited by RF magnetron sputtering

Vacuum ◽  
2017 ◽  
Vol 146 ◽  
pp. 93-96 ◽  
Author(s):  
Hao Zhang ◽  
Jinxiang Deng ◽  
Zhiwei Pan ◽  
Zhiying Bai ◽  
Le Kong ◽  
...  
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