scholarly journals Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

2008 ◽  
Vol 31 (5) ◽  
pp. 813-818 ◽  
Author(s):  
S. B. Singh ◽  
M. Pandey ◽  
N. Chand ◽  
A. Biswas ◽  
D. Bhattacharya ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Optical And Mechanical Properties

Optical and Mechanical Properties of Hard Hydrogenated Amorphous Carbon Films Deposited by Plasma CVD

1990 ◽  
Vol 29 (Part 1, No. 12) ◽  
pp. 2815-2819 ◽  
Author(s):  
Haruki Yokoyama ◽  
Masaki Okamoto ◽  
Toshifumi Yamasaki ◽  
Katsumi Takahiro ◽  
Yukio Osaka ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Hydrogenated Amorphous Carbon ◽  
Optical And Mechanical Properties ◽  
Hydrogenated Amorphous

Amorphous diamond-like carbon films: Effect of deposition rate on optical and mechanical properties

1985 ◽  
Vol 77-78 ◽  
pp. 837-840 ◽  
Author(s):  
J.M. Mackowski ◽  
R. Pignard ◽  
N. Vedovotto ◽  
P. Robert ◽  
A. Donnadieu
Keyword(s):  
Mechanical Properties ◽  
Deposition Rate ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Optical And Mechanical Properties

scholarly journals Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD

2012 ◽  
Vol 63 (1) ◽  
pp. 35
Author(s):  
Shuji YAMAMOTO ◽  
Noriaki HIDAKA ◽  
Atsuo KAWANA ◽  
Chitoshi MASUDA
Keyword(s):  
Tribological Behavior ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd

Effect of RF Negative Bias on the Structure and Performance of Diamond-Like Carbon Films in ECR Plasma

2013 ◽  
Vol 423-426 ◽  
pp. 756-761
Author(s):  
Li Jun Sang ◽  
Qiang Chen ◽  
Zhong Wei Liu ◽  
Zheng Duo Wang
Keyword(s):  
Friction Coefficient ◽  
Electron Cyclotron Resonance ◽  
Crystalline Silicon ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Negative Bias ◽  
Film Property ◽  
Ecr Plasma ◽  
Peak Intensity ◽  
Stretching Vibration

Diamond-like carbon films (DLC) were deposited on single crystalline silicon surface under different RF negative bias in microwave electron cyclotron resonance (ECR) plasma source. The chemical structure and morphology were characterized by Fourier transformation infrared spectroscopy (FTIR) and atomic force microscopy (AFM). The friction coefficient of films was measured to examine the film property later. The results show that the smooth and compact deposited films were typical hydrogenated diamond-like carbon with CHn stretching vibration in 2800-3000cm-1. It is noticed that with the increase of RF bias on the substrate the peak intensity for C-H stretching vibration in spectrum between 2800cm-1~3000cm-1 increased at the beginning and then decreased, which caused the friction coefficient of the film being smaller and then larger in reverse. In 50W RF biased power one can obtain the maximum-CHn peak intensity and the minimum friction coefficient.

Diamond-like carbon films from CO source gas by RF plasma CVD method

2014 ◽  
Vol 54 (1S) ◽  
pp. 01AD04 ◽  
Author(s):  
Yuki Yasuoka ◽  
Toru Harigai ◽  
Jun-Seok Oh ◽  
Hiroshi Furuta ◽  
Akimitsu Hatta ◽  
...  
Keyword(s):  
Carbon Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Cvd Method
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