On the microstructural, optical and mechanical properties of hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00288-5 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 752-755 ◽

Author(s):

O. Durand-Drouhin ◽

A. Zeinert ◽

M. Benlahsen ◽

K. Zellama ◽

R. Kré ◽

...

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Optical And Mechanical Properties ◽

Hydrogenated Amorphous ◽

Resonance Plasma

Download Full-text

Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Plasma Chemistry and Plasma Processing ◽

10.1007/s11090-012-9355-2 ◽

2012 ◽

Vol 32 (2) ◽

pp. 231-248 ◽

Author(s):

Haruhiko Ito ◽

Katsuaki Koshimura ◽

Saori Onitsuka ◽

Kohtaro Okada ◽

Tsuneo Suzuki ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Dissociative Excitation ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

Download Full-text

Effect of the hydrogen on the intrinsic stress in hydrogenated amorphous carbon films deposited from an electron cyclotron resonance plasma

Applied Physics Letters ◽

10.1063/1.122726 ◽

1998 ◽

Vol 73 (22) ◽

pp. 3226-3228 ◽

Author(s):

B. Racine ◽

M. Benlahsen ◽

K. Zellama ◽

P. Goudeau ◽

M. Zarrabian ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Intrinsic Stress ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Resonance Plasma

Download Full-text

The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma

Materials Science in Semiconductor Processing ◽

10.1016/s1369-8001(00)00097-4 ◽

2001 ◽

Vol 4 (1-3) ◽

pp. 213-215

Author(s):

O. Durand-Drouhin ◽

M. Lejeune ◽

R. Bouzerar ◽

M. Benlahsen

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous Carbon ◽

Hydrogenated Amorphous ◽

Resonance Plasma

Download Full-text

Solid Solubility of Nitrogen in Amorphous Carbon Films Deposited in Electron Cyclotron Resonance Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.4983 ◽

1998 ◽

Vol 37 (Part 1, No. 9A) ◽

pp. 4983-4988 ◽

Author(s):

Hidetoshi Saitoh ◽

Tohru Inoue ◽

Shigeo Ohshio

Keyword(s):

Amorphous Carbon ◽

Solid Solubility ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Resonance Plasma

Download Full-text

Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma

International Journal of Refractory Metals and Hard Materials ◽

10.1016/j.ijrmhm.2005.07.004 ◽

2006 ◽

Vol 24 (1-2) ◽

pp. 39-48 ◽

Author(s):

F. Piazza

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Amorphous Carbon Films ◽

Tetrahedral Amorphous Carbon ◽

Resonance Plasma

Download Full-text

Hydrogenated amorphous carbon films deposited in an electron cyclotron resonance–chemical vapor deposition discharge reactor using acetylene

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00252-6 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 654-657 ◽

Author(s):

B.K. Kim ◽

T.A. Grotjohn

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous

Download Full-text

Nitrogenated amorphous carbon films synthesized by electron cyclotron resonance plasma enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00017-5 ◽

1999 ◽

Vol 8 (8-9) ◽

pp. 1732-1736 ◽

Author(s):

W.-C. Chan ◽

M.-K. Fung ◽

I. Bello ◽

C.-S. Lee ◽

S.-T. Lee

Keyword(s):

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Resonance Plasma

Download Full-text

Optical gap of fluorinated amorphous carbon films prepared by electron cyclotron resonance trifluromethane and benzene plasmas

Diamond and Related Materials ◽

10.1016/j.diamond.2003.10.052 ◽

2004 ◽

Vol 13 (1) ◽

pp. 191-197 ◽

Author(s):

Chao Ye ◽

Zhaoyuan Ning ◽

Shanhua Cheng ◽

Yu Xin ◽

Shenhua Xu

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films ◽

Download Full-text

Effect of Bias Voltage on the Physical Properties of Hydrogenated Amorphous Carbon Films Grown by Electron Cyclotron Resonance Chemical Vapour Deposition

Advances in Science and Technology - Diamond and Other New Carbon Materials IV ◽

10.4028/3-908158-04-4.17 ◽

2006 ◽

pp. 17-23

Author(s):

J.G. Buijnsters ◽

M. Camero ◽

L. Vázquez ◽

F. Agullo-Rueda ◽

C. Gómez-Aleixandre ◽

...

Keyword(s):

Physical Properties ◽

Chemical Vapour Deposition ◽

Bias Voltage ◽

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Carbon Films ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous

Download Full-text

Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

Thin Solid Films ◽

10.1016/s0040-6090(98)01332-7 ◽

1999 ◽

Vol 340 (1-2) ◽

pp. 62-67 ◽

Author(s):

S.F. Yoon ◽

Rusli ◽

J. Ahn ◽

Q. Zhang ◽

C.Y. Yang ◽

...

Keyword(s):

Amorphous Carbon ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Amorphous Carbon Films

Download Full-text