Diamond-like carbon films from CO source gas by RF plasma CVD method

2014 ◽  
Vol 54 (1S) ◽  
pp. 01AD04 ◽  
Author(s):  
Yuki Yasuoka ◽  
Toru Harigai ◽  
Jun-Seok Oh ◽  
Hiroshi Furuta ◽  
Akimitsu Hatta ◽  
...  
Keyword(s):  
Carbon Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Cvd Method

scholarly journals Deposition of amorphous-carbon films by RF plasma CVD method.

1991 ◽  
Vol 17 (2) ◽  
pp. 305-312
Author(s):  
Tohru Mitomo ◽  
Tomohiro Ohta ◽  
Hiroaki Sasaki ◽  
Kenichi Ohtsuka ◽  
Yasuhiro Habu
Keyword(s):  
Amorphous Carbon ◽  
Carbon Films ◽  
Rf Plasma ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method

scholarly journals Diamond-like carbon films deposited on optical glass substrate by using ECR microwave acetone plasma CVD method

2004 ◽  
Vol 53 (9) ◽  
pp. 3099
Author(s):  
Yang Wu-Bao ◽  
Wang Jiu-Li ◽  
Zhang Gu-Ling ◽  
Fan Song-Hua ◽  
Liu Chi-Zi ◽  
...  
Keyword(s):  
Glass Substrate ◽  
Optical Glass ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Cvd Method

Synthesis of diamond on substrate with mechanical treatment by RF plasma CVD method

1993 ◽  
Vol 2 (1) ◽  
pp. 18-22 ◽  
Author(s):  
Y Shimada ◽  
K Kobayashi ◽  
N Mutsukura ◽  
Y Machi
Keyword(s):  
Mechanical Treatment ◽  
Rf Plasma ◽  
Plasma Cvd ◽  
Cvd Method

scholarly journals Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD

2012 ◽  
Vol 63 (1) ◽  
pp. 35
Author(s):  
Shuji YAMAMOTO ◽  
Noriaki HIDAKA ◽  
Atsuo KAWANA ◽  
Chitoshi MASUDA
Keyword(s):  
Tribological Behavior ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd

scholarly journals Properties of Amorphous Carbon Films Synthesized by Atmospheric Pressure Glow Plasma CVD Method

2006 ◽  
Vol 19 (5) ◽  
pp. 673-678 ◽  
Author(s):  
Hideyuki Kodama ◽  
Satoshi Iizumi ◽  
Masayuki Nakaya ◽  
Akira Shirakura ◽  
Atsushi Morita ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Cvd Method ◽  
Atmospheric Pressure Glow Plasma ◽  
Glow Plasma

scholarly journals Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

2008 ◽  
Vol 31 (5) ◽  
pp. 813-818 ◽  
Author(s):  
S. B. Singh ◽  
M. Pandey ◽  
N. Chand ◽  
A. Biswas ◽  
D. Bhattacharya ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Ecr Plasma ◽  
Optical And Mechanical Properties
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