Two-step hydrogen-ion implantation annihilation of threading dislocation defects in strain-relaxed Si0.7Ge0.3

2021 ◽  
Author(s):  
Joo-Hyeong Park ◽  
Jea-Gun Park
Keyword(s):  
Ion Implantation ◽  
Hydrogen Ion ◽  
Threading Dislocation ◽  
Dislocation Defects ◽  
Hydrogen Ion Implantation

The Influence Of Silicon Orientation On Surface Blistering Behaviors for Molecular Hydrogen Ion Implantation

2019 ◽  
Vol 34 (1) ◽  
pp. 1159-1164
Author(s):  
Yu Cheng Hsiao ◽  
Jenq-Horng Liang ◽  
Chih-Ming Lin
Keyword(s):  
Ion Implantation ◽  
Molecular Hydrogen ◽  
Hydrogen Ion ◽  
Hydrogen Ion Implantation

X-ray-emission study of the structure of Si:H layers formed by low-energy hydrogen-ion implantation

2002 ◽  
Vol 36 (5) ◽  
pp. 568-573 ◽  
Author(s):  
V. R. Galakhov ◽  
I. V. Antonova ◽  
S. N. Shamin ◽  
V. I. Aksenova ◽  
V. I. Obodnikov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Low Energy ◽  
Hydrogen Ion ◽  
X Ray ◽  
Emission Study ◽  
Hydrogen Ion Implantation

scholarly journals Effects of hydrogen ion implantation dose on physical and electrical properties of Ge-on-insulator layers fabricated by the smart-cut process

AIP Advances ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 015045
Author(s):  
C.-M. Lim ◽  
Z. Zhao ◽  
K. Sumita ◽  
K. Toprasertpong ◽  
M. Takenaka ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Ion Implantation ◽  
Implantation Dose ◽  
Hydrogen Ion ◽  
Insulator Layers ◽  
Hydrogen Ion Implantation

A model for trapping and re-emission at hydrogen ion implantation

1994 ◽  
Vol 211 (2) ◽  
pp. 127-134 ◽  
Author(s):  
A.A. Pisarev ◽  
S.K. Zhdanov ◽  
O.V. Ogorodnikova
Keyword(s):  
Ion Implantation ◽  
Hydrogen Ion ◽  
Hydrogen Ion Implantation

Modification of electrical conductivity in RF magnetron sputtered ZnO films by low-energy hydrogen ion implantation

2006 ◽  
Vol 6 (3) ◽  
pp. 495-498 ◽  
Author(s):  
J. Kennedy ◽  
A. Markwitz ◽  
Z. Li ◽  
W. Gao ◽  
C. Kendrick ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Ion Implantation ◽  
Low Energy ◽  
Hydrogen Ion ◽  
Zno Films ◽  
Hydrogen Ion Implantation

Effects of hydrogen ion implantation on Al/Si Schottky diodes

1987 ◽  
Vol 50 (21) ◽  
pp. 1530-1532 ◽  
Author(s):  
A. S. Yapsir ◽  
P. Hadizad ◽  
T.‐M. Lu ◽  
J. C. Corelli ◽  
W. A. Lanford ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Schottky Diodes ◽  
Hydrogen Ion ◽  
Hydrogen Ion Implantation

Hydrogen ion implantation profiles as determined by SIMS

1978 ◽  
Vol 149 (1-3) ◽  
pp. 529-533 ◽  
Author(s):  
Charles W. Magee ◽  
Chung P. Wu
Keyword(s):  
Ion Implantation ◽  
Hydrogen Ion ◽  
Hydrogen Ion Implantation
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