Preparation and properties of boron-doped silicon films grown at low temperature by chemical vapor deposition
Keyword(s):
1973 ◽
Vol 120
(10)
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pp. 1438
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Keyword(s):
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Keyword(s):
1995 ◽
pp. 55-66
Keyword(s):
1994 ◽
Vol 141
(5)
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pp. 1284-1290
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