Thermal nitridation of silicon dioxide films

Vacuum ◽  
1989 ◽  
Vol 39 (5) ◽  
pp. 517
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thermal Nitridation

Thermal nitridation of silicon dioxide films

1982 ◽  
Vol 53 (10) ◽  
pp. 6996-7002 ◽  
Author(s):  
F. H. P. M. Habraken ◽  
A. E. T. Kuiper ◽  
Y. Tamminga ◽  
J. B. Theeten
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thermal Nitridation

Rapid thermal nitridation of thin thermal silicon dioxide films

1985 ◽  
Vol 47 (2) ◽  
pp. 148-150 ◽  
Author(s):  
J. Nulman ◽  
J. P. Krusius
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thermal Nitridation

Measurements and Modelling of Thin Silicon Dioxide Films on Silicon

1989 ◽  
Author(s):  
A. Kalnitsky ◽  
S. P. Tay ◽  
J. P. Ellul ◽  
J. W. Andrews ◽  
E. A. Irene ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Selection and characteristics of peptides that bind thermally grown silicon dioxide films

2005 ◽  
Vol 22 (5-6) ◽  
pp. 201-204 ◽  
Author(s):  
Edward Eteshola ◽  
Leonard J. Brillson ◽  
Stephen Craig Lee
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thermally Grown

Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

2008 ◽  
Vol 47 (11) ◽  
pp. 8317-8320
Author(s):  
Takaaki Hirokane ◽  
Naoto Yoshii ◽  
Tatsuya Okazaki ◽  
Shinichi Urabe ◽  
Kazuo Nishimura ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Tunneling Current ◽  
Metal Gates ◽  
Silicon Dioxide Films
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