Acoustic Plasmons in Graphene Sandwiched between Two Metallic Slabs

We study the effect of two metallic slabs on the collective dynamics of electrons in graphene positioned between the two slabs. We show that if the slabs are perfect conductors, the plasmons of graphene display a linear dispersion relation. The velocity of these acoustic plasmons crucially depends on the distance between the two metal gates and the graphene sheet. In the case of generic slabs, the dispersion relation of graphene plasmons is much more complicated, but we find that acoustic plasmons can still be obtained under specific conditions.

Selective Nickel Platinum Removal without Titanium Nitride Metal Gate Corrosion

During silicide formation, unreacted NiPt metals is traditionally removed either by aqua regia (ESH concern) or SPM. This latter can easily degrade the device yield in HKMG (High K Metal Gate) nodes if the metal gates (usually TiN based) aren’t perfectly encapsulated. First some new characterizations are presented to better understand the NiPt metal alloy removal, then a new solution is given to be able to remove this alloy without degrading HKMG materials.

Analysis of Work-Function Variation Effects in a Tunnel Field-Effect Transistor Depending on the Device Structure

Metal gate technology is one of the most important methods used to increase the low on-current of tunnel field-effect transistors (TFETs). However, metal gates have different work-functions for each grain during the deposition process, resulting in work-function variation (WFV) effects, which means that the electrical characteristics vary from device to device. The WFV of a planar TFET, double-gate (DG) TFET, and electron-hole bilayer TFET (EHBTFET) were examined by technology computer-aided design (TCAD) simulations to analyze the influences of device structure and to find strategies for suppressing the WFV effects in TFET. Comparing the WFV effects through the turn-on voltage (Vturn-on) distribution, the planar TFET showed the largest standard deviation (σVturn-on) of 20.1 mV, and it was reduced by −26.4% for the DG TFET and −80.1% for the EHBTFET. Based on the analyses regarding metal grain distribution and energy band diagrams, the WFV of TFETs was determined by the number of metal grains involved in the tunneling current. Therefore, the EHBTFET, which can determine the tunneling current by all of the metal grains where the main gate and the sub gate overlap, is considered to be a promising structure that can reduce the WFV effect of TFETs.