Sub-micron position measurement and control on precision machine tools with laser interferometry

1990 ◽  
Vol 12 (1) ◽  
pp. 12-24 ◽  
Author(s):  
C.R. Steinmetz
Mechatronics ◽  
1993 ◽  
Vol 3 (2) ◽  
pp. 181-184 ◽  
Author(s):  
Zoltán Füzessy ◽  
Árpád Kiss ◽  
Pál Pacher

Author(s):  
Paul Shore ◽  
Paul Morantz

This paper provides a perspective on the development of ultra-precision technologies: What drove their evolution and what do they now promise for the future as we face the consequences of consumption of the Earth’s finite resources? Improved application of measurement is introduced as a major enabler of mass production, and its resultant impact on wealth generation is considered. This paper identifies the ambitions of the defence, automotive and microelectronics sectors as important drivers of improved manufacturing accuracy capability and ever smaller feature creation. It then describes how science fields such as astronomy have presented significant precision engineering challenges, illustrating how these fields of science have achieved unprecedented levels of accuracy, sensitivity and sheer scale. Notwithstanding their importance to science understanding, many science-driven ultra-precision technologies became key enablers for wealth generation and other well-being issues. Specific ultra-precision machine tools important to major astronomy programmes are discussed, as well as the way in which subsequently evolved machine tools made at the beginning of the twenty-first century, now provide much wider benefits.


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