114 Atmospheric Compensation for Nano-meter Position Measurement and Control on Ultra-Precision Machine Tools with Interferometry

This paper provides a perspective on the development of ultra-precision technologies: What drove their evolution and what do they now promise for the future as we face the consequences of consumption of the Earth’s finite resources? Improved application of measurement is introduced as a major enabler of mass production, and its resultant impact on wealth generation is considered. This paper identifies the ambitions of the defence, automotive and microelectronics sectors as important drivers of improved manufacturing accuracy capability and ever smaller feature creation. It then describes how science fields such as astronomy have presented significant precision engineering challenges, illustrating how these fields of science have achieved unprecedented levels of accuracy, sensitivity and sheer scale. Notwithstanding their importance to science understanding, many science-driven ultra-precision technologies became key enablers for wealth generation and other well-being issues. Specific ultra-precision machine tools important to major astronomy programmes are discussed, as well as the way in which subsequently evolved machine tools made at the beginning of the twenty-first century, now provide much wider benefits.

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Research on Deterministic Figuring of Ultra-Precision Shaft Parts Based on Analysis and Control of Figuring Ability

Materials ◽

10.3390/ma13112458 ◽

2020 ◽

Vol 13 (11) ◽

pp. 2458

Author(s):

Zizhou Sun ◽

Yifan Dai ◽

Hao Hu ◽

Guipeng Tie ◽

Chaoliang Guan ◽

...

Keyword(s):

Machine Tools ◽

Measured Data ◽

Numerical Control ◽

Cnc Machine Tools ◽

Machining Efficiency ◽

Air Bearing ◽

Cnc Machine ◽

Ultra Precision ◽

Precision Machine Tools ◽

And Control

The application of ultra-precision shaft parts is widely used, such as the spindle core of the air bearing spindle in ultra-precision machine tools. The precision of the spindle core is extremely high, and it is very difficult to obtain directly by traditional Computer Numerical Control (CNC) machine tools but is mostly obtained by manual grinding, whose machining efficiency is greatly limited. Based on the deterministic figuring theory, this paper focuses on the ultra-precision roundness, optimizing the filtering parameters of the measurement error data and studying the generation mechanism of the removal function morphology; the shape of the removal function is adjusted by combining the analysis of the figuring ability and positioning error. Finally, the optimized removal function is used on an experimental steel shaft, the average roundness convergence ratio is 72% higher than that of the original removal function, and the roundness reaches a 0.1 μm level. The result shows that a reasonable filtering of measured data and the removal function adjusted for the surface feature can improve the efficiency and precision of deterministic figuring on shaft parts.

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Dynamic characteristics of spindle with water-lubricated hydrostatic bearings for ultra-precision machine tools

Precision Engineering ◽

10.1016/j.precisioneng.2020.02.003 ◽

2020 ◽

Vol 63 ◽

pp. 187-196 ◽

Cited By ~ 1

Author(s):

Dmytro Fedorynenko ◽

Rei Kirigaya ◽

Yohichi Nakao

Keyword(s):

Dynamic Characteristics ◽

Machine Tools ◽

Precision Machine ◽

Hydrostatic Bearings ◽

Ultra Precision ◽

Precision Machine Tools

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Current Development and Countermeasure of Ultra-Precision Machine Tools

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.455.632 ◽

2010 ◽

Vol 455 ◽

pp. 632-636

Author(s):

R.J. Song ◽

J.L. Niu ◽

Dong Hai Chen

Keyword(s):

Machine Tools ◽

Precision Machining ◽

Machining Accuracy ◽

Current Development ◽

Factors Influencing ◽

Precision Machine ◽

Ultra Precision ◽

Precision Machine Tools

Ultra-precision machine tools is an important machinery equipment to implement ultra-precision machining. Current development and the trend of the ultra-precision machine tools was analyzed. The factors influencing machining accuracy were pointed out from the viewpoint of system. Some suggestions were put forward on the domestic development and research of the ultra-precision machine tools.

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