Effect of Oxygen Partial Pressure on the Stoichiometric Composition of Titanium Oxide Films during Magnetron Sputtering
1993 ◽
Vol 68
(3)
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pp. 319-325
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2013 ◽
Vol 41
(8)
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pp. 1837-1843
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2005 ◽
Vol 288-289
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pp. 299-302
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2010 ◽
Vol 256
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pp. 3142-3147
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pp. 071601
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pp. 125-135
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2011 ◽
Vol 8
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pp. 2742-2745
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