Abstract
Tailoring the angular spectrum with annular illumination and collection can significantly improve integrated circuit analysis with an optical microscope, when combined with solid immersion. We present the development, testing, and optimization of a simple and compact apparatus to implement annular illumination and collection in a Hamamatsu iPHEMOS system. We demonstrated improved imaging of an IBM 45nm silicon-oninsulator circuit, with annular illumination and collection in confocal scanning optical microscopy and widefield microscopy with an InGaAs camera.
Journal of Cell Science Volume 94, Part 2, October 1989, pages 175–206.
The citation ‘Reproduced, with permission, from Koch et al. (1987).’ given in the figure legend of Fig. 13 is incorrect. The citation should read ‘Reproduced, with permission, from White, J. G. et al. (1987). Further details of the cells, antigen and labelling conditions used, and other examples of such confocal images may be found in Koch et al. (1987).’
NEW DEVELOPMENT IN CONFOCAL SCANNING OPTICAL MICROSCOPY AND ITS APPLICATION TO THE STUDY OF ELECTRICALLY ACTIVE DEFECTS IN SEMICONDUCTORS