ABSTRACTThe ferroelectric polarization of thin films of BaxSr1−xTiO3 is imaged using confocal scanning optical microscopy (CSOM). The thin films are grown by pulsed laser deposition (PLD) on SrTiO3 substrates. Ferroelectric domain structure is imaged by applying a small ac electric field across interdigitated electrodes, and measuring induced reflectivity changes in the film, which are directly related to the polarization. Domain re-orientation is observed by acquiring CSOM images as a function of the dc electric field. Local hysteresis loops are obtained by sweeping the dc electric field at fixed positions on the sample. Micrometer-sized regions exhibit both ferroelectric and paraelectric response, indicating that thermal broadening of the phase transition is largely due to inhomogeneities in the thin films.
Abstract
Tailoring the angular spectrum with annular illumination and collection can significantly improve integrated circuit analysis with an optical microscope, when combined with solid immersion. We present the development, testing, and optimization of a simple and compact apparatus to implement annular illumination and collection in a Hamamatsu iPHEMOS system. We demonstrated improved imaging of an IBM 45nm silicon-oninsulator circuit, with annular illumination and collection in confocal scanning optical microscopy and widefield microscopy with an InGaAs camera.
Optical nanowriting on azobenzene side-chain polymethacrylate thin films by near-field scanning optical microscopy