Characterization of surface processes during oxide CMP by in situ FTIR spectroscopy

2022 ◽  
pp. 413-451
Author(s):  
U. Künzelmann ◽  
H. Schumacher-Härtwig
Keyword(s):  
Ftir Spectroscopy ◽  
Surface Processes ◽  
In Situ Ftir ◽  
In Situ Ftir Spectroscopy

CO Oxidation and Site Speciation for Alloyed Palladium–Platinum Model Catalysts Studied by in Situ FTIR Spectroscopy

2017 ◽  
Vol 121 (47) ◽  
pp. 26321-26329 ◽  
Author(s):  
Natalia M. Martin ◽  
Magnus Skoglundh ◽  
Gudmund Smedler ◽  
Agnes Raj ◽  
David Thompsett ◽  
...  
Keyword(s):  
Co Oxidation ◽  
Ftir Spectroscopy ◽  
Model Catalysts ◽  
In Situ Ftir ◽  
In Situ Ftir Spectroscopy ◽  
Palladium Platinum

scholarly journals Monitoring of SiC Deposition in an Industrial CVI/CVD Reactor by In-Situ FTIR Spectroscopy

1995 ◽  
Vol 05 (C5) ◽  
pp. C5-97-C5-104 ◽  
Author(s):  
H. Mosebach ◽  
V. Hopfe ◽  
M. Erhard ◽  
M. Meyer
Keyword(s):  
Ftir Spectroscopy ◽  
In Situ Ftir ◽  
In Situ Ftir Spectroscopy

Spectroelectrochemical studies of magnesium deposition by in situ FTIR spectroscopy

2001 ◽  
Vol 3 (5) ◽  
pp. 252-261 ◽  
Author(s):  
D. Aurbach ◽  
R. Turgeman ◽  
O. Chusid ◽  
Y. Gofer
Keyword(s):  
Ftir Spectroscopy ◽  
In Situ Ftir ◽  
In Situ Ftir Spectroscopy
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