Preparation and characterization of the amorphous tungsten cone field emitter arrays by Ar+ etching

Applied Surface Science ◽

10.1016/j.apsusc.2009.08.044 ◽

2009 ◽

Vol 256 (3) ◽

pp. 693-697 ◽

Author(s):

Fang Yan Xie ◽

Li Gong ◽

Xiao Liu ◽

Jian Chen ◽

Wei Guang Xie ◽

...

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

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Fabrication and Characterization of Diamond-Clad Silicon Field Emitter Arrays

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.6926 ◽

1995 ◽

Vol 34 (Part 1, No. 12B) ◽

pp. 6926-6931 ◽

Author(s):

Huang-Chung Cheng ◽

Tzu-Kun Ku ◽

Biing-Bang Hsieh ◽

Sheng-Hsiung Chen ◽

Shye-Yuh Leu ◽

...

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

Fabrication And Characterization

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Fabrication and electrical characterization of high aspect ratio silicon field emitter arrays

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1371018 ◽

2001 ◽

Vol 19 (3) ◽

pp. 916 ◽

Author(s):

I. W. Rangelow ◽

St. Biehl

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Electrical Characterization ◽

Field Emitter ◽

Field Emitter Arrays

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Fabrication and characterization of silicon field emitter arrays by spin-on-glass etch-back process

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589786 ◽

1998 ◽

Vol 16 (1) ◽

pp. 238 ◽

Author(s):

Jin Ho Lee

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

Fabrication And Characterization

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The fabrication and characterization of large scale integrated field emitter arrays for high current electron sources

Proceedings of International Electron Devices Meeting ◽

10.1109/iedm.1995.499387 ◽

2002 ◽

Author(s):

M. Urayama ◽

T. Tokumaru ◽

Y. Takegawa ◽

Y. Morita ◽

Y. Maruo ◽

...

Keyword(s):

Large Scale ◽

High Current ◽

Field Emitter ◽

Electron Sources ◽

Field Emitter Arrays ◽

Current Electron ◽

Fabrication And Characterization ◽

High Current Electron

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Characterization of field emitter arrays (FEAs) for a twystrode amplifier

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.605075 ◽

2002 ◽

Author(s):

M. Garven ◽

M.T. Ngo ◽

B.J. Sobocinski ◽

F. Calise ◽

M.A. Kodis

Keyword(s):

Field Emitter ◽

Field Emitter Arrays

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Electron beam characterization of double gate field emitter arrays fabricated by a focused ion beam assisted process

25th International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2012.6316945 ◽

2012 ◽

Author(s):

Patrick Helfenstein ◽

Konstantins Jefimovs ◽

Eugenie Kirk ◽

Conrad Escher ◽

Hans-Werner Fink ◽

...

Keyword(s):

Electron Beam ◽

Focused Ion Beam ◽

Ion Beam ◽

Double Gate ◽

Field Emitter ◽

Field Emitter Arrays ◽

Beam Characterization

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Fabrication and characterization of silicon field emitter arrays with focusing electrode by the chemical mechanical polishing process

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589911 ◽

1998 ◽

Vol 16 (2) ◽

pp. 811 ◽

Author(s):

Jin Ho Lee

Keyword(s):

Chemical Mechanical Polishing ◽

Mechanical Polishing ◽

Polishing Process ◽

Field Emitter ◽

Field Emitter Arrays ◽

Chemical Mechanical Polishing Process ◽

Fabrication And Characterization

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Characterization of field emitter arrays for compact neutron sources utilizing field ionization

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6384067 ◽

2012 ◽

Author(s):

A. Persaud ◽

T. Schenkel ◽

R. Kapadia ◽

K. Takei ◽

A. Javey

Keyword(s):

Field Ionization ◽

Field Emitter ◽

Neutron Sources ◽

Field Emitter Arrays

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Electrical characterization of porous silicon field emitter arrays

Eleventh International Vacuum Microelectronics Conference. IVMC'98 (Cat. No.98TH8382) ◽

10.1109/ivmc.1998.728672 ◽

2002 ◽

Author(s):

Hong Ryong Kim ◽

J.R. Jessing ◽

D.L. Parker

Keyword(s):

Porous Silicon ◽

Electrical Characterization ◽

Field Emitter ◽

Field Emitter Arrays

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Fabrication and characterization of phosphorus-implanted mold-type diamond field-emitter arrays

Thin Solid Films ◽

10.1016/s0040-6090(03)00342-0 ◽

2003 ◽

Vol 435 (1-2) ◽

pp. 324-328 ◽

Author(s):

Euo Sik Cho ◽

Sang Jik Kwon ◽

Hwi Chan Yang ◽

Hyung Soo Uh ◽

Yeo Hwan Kim ◽

...

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

Fabrication And Characterization

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