Fabrication and characterization of silicon field emitter arrays with focusing electrode by the chemical mechanical polishing process

Mechanical Polishing ◽

Polishing Process ◽

Field Emitter ◽

Field Emitter Arrays ◽

Chemical Mechanical Polishing Process ◽

Fabrication And Characterization

Characterization of a New Cleaning Method Using Electrolytic Ionized Water for Polysilicon Chemical Mechanical Polishing Process

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.5098 ◽

2002 ◽

Vol 41 (Part 1, No. 8) ◽

pp. 5098-5103 ◽

Cited By ~ 6

Author(s):

Naoto Miyashita ◽

Shin-ichiro Uekusa ◽

Hiroshi Katumata

Keyword(s):

Mechanical Polishing ◽

Polishing Process ◽

Cleaning Method ◽

Ellipsometry characterization of oxidized copper layers for chemical mechanical polishing process

Thin Solid Films ◽

10.1016/j.tsf.2004.01.021 ◽

2004 ◽

Vol 455-456 ◽

pp. 491-494 ◽

Cited By ~ 8

Author(s):

H. Nishizawa ◽

Y. Tateyama ◽

T. Saitoh

Keyword(s):

Mechanical Polishing ◽

Polishing Process ◽

Fabrication of ruthenium thin film and characterization of its chemical mechanical polishing process

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2015.06.017 ◽

2015 ◽

Vol 162 ◽

pp. 477-486 ◽

Cited By ~ 11

Author(s):

Yi-Sin Chou ◽

Shi-Chern Yen ◽

King-Tsai Jeng

Keyword(s):

Thin Film ◽

Mechanical Polishing ◽

Polishing Process ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Characterization of scratches generated by a multiplaten copper chemical–mechanical polishing process

10.1116/1.1634958 ◽

2004 ◽

Vol 22 (1) ◽

pp. 65 ◽

Cited By ~ 13

Author(s):

T. Y. Teo ◽

W. L. Goh ◽

V. S. K. Lim ◽

L. S. Leong ◽

T. Y. Tse ◽

...

Keyword(s):

Mechanical Polishing ◽

Polishing Process ◽

Characterization of the Chemical‐Mechanical Polishing Process Based on Nanoindentation Measurement of Dielectric Films

Journal of The Electrochemical Society ◽

10.1149/1.2048695 ◽

1995 ◽

Vol 142 (9) ◽

pp. 3098-3104 ◽

Cited By ~ 12

Author(s):

Chi‐Wen Liu ◽

Bau‐Tong Dai ◽

Ching‐Fa Yeh

Keyword(s):

Mechanical Polishing ◽

Dielectric Films ◽

Polishing Process ◽

Nanoindentation Measurement ◽

Applications Of Chemical-mechanical-polishing Process To Silicon Field Emitter Array

Proceedings of the Fourth Asian Symposium on Information Display ◽

10.1109/asid.1997.631423 ◽

1997 ◽

Cited By ~ 1

Author(s):

Jin Ho Lee ◽

Yoon-Ho Song ◽

Sung Weon Kang ◽

Byoung Gon Yu ◽

Kyoung Ik Cho ◽

...

Keyword(s):

Mechanical Polishing ◽

Polishing Process ◽

Field Emitter ◽

Chemical Mechanical Polishing Process ◽

Emitter Array ◽

Field Emitter Array

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

Effect of temperature on copper damascene chemical mechanical polishing process

10.1116/1.2825143 ◽

2008 ◽

Vol 26 (1) ◽

pp. 141 ◽

Cited By ~ 13

Author(s):

Veera Raghava Kakireddy ◽

Subrahmanya Mudhivarthi ◽

Ashok Kumar

Keyword(s):

Mechanical Polishing ◽

Effect Of Temperature ◽

Polishing Process ◽

Integrated Tungsten Chemical Mechanical Polishing Process Characterization for Via Plug Interconnection in Ultralarge Scale Integrated Circuits

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.5120 ◽

2002 ◽

Vol 41 (Part 1, No. 8) ◽

pp. 5120-5124 ◽

Cited By ~ 5

Author(s):

Chin-Kun Wang ◽

Hua-Shu Wu ◽

Nai-Tien Ou ◽

Huang-Chung Cheng

Keyword(s):

Integrated Circuits ◽

Mechanical Polishing ◽

Polishing Process ◽

Process Characterization ◽

Applications of Taguchi and design of experiments methods in optimization of chemical mechanical polishing process parameters

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-007-1124-7 ◽

2007 ◽

Vol 38 (7-8) ◽

pp. 674-682 ◽

Cited By ~ 36

Author(s):

Hsin-Te Liao ◽

Jie-Ren Shie ◽

Yung-Kuang Yang

Keyword(s):

Design Of Experiments ◽

Process Parameters ◽

Mechanical Polishing ◽

Polishing Process ◽

Fabrication and Characterization of Diamond-Clad Silicon Field Emitter Arrays

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.6926 ◽

1995 ◽

Vol 34 (Part 1, No. 12B) ◽

pp. 6926-6931 ◽

Cited By ~ 16

Author(s):

Huang-Chung Cheng ◽

Tzu-Kun Ku ◽

Biing-Bang Hsieh ◽

Sheng-Hsiung Chen ◽

Shye-Yuh Leu ◽

...

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

Fabrication And Characterization