scholarly journals Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

2015 ◽  
Vol 353 ◽  
pp. 708-713 ◽  
Author(s):  
A. Dolgov ◽  
D. Lopaev ◽  
C.J. Lee ◽  
E. Zoethout ◽  
V. Medvedev ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Carbon Contamination ◽  
Tin Plasma ◽  
Extreme Ultraviolet Light

scholarly journals Extreme ultraviolet light from a tin plasma driven by a 2-\si{\micro\meter}-wavelength laser

2020 ◽  
Author(s):  
Oscar Versolato ◽  
Lars Behnke ◽  
Ruben Schupp ◽  
Zoi Bouza ◽  
MUHARREM BAYRAKTAR ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Tin Plasma ◽  
Extreme Ultraviolet Light

High-radiance extreme-ultraviolet light source for actinic inspection and metrology

2012 ◽  
Vol 11 (2) ◽  
pp. 021107-1 ◽  
Author(s):  
Peter Choi ◽  
Sergey V. Zakharov ◽  
Raul Aliaga-Rossel ◽  
Aldrice Bakouboula ◽  
Otman Benali ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light
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