Water pollution has always been an important issue threatening human health. Water quality monitoring is an important step to ensure water quality safety. Water quality parameters such as pH, temperature and conductivity are important indicators in water quality monitoring. In this paper, a multi-parameter water quality detection integrated chip system is studied, and multiple sensors are integrated on the same chip to realize the monitoring of conventional parameters such as pH, temperature and conductivity in drinking water. The chip system was processed by MEMS technology. A ruthenium oxide (RuO2) film is used for pH detection, and the sensor exhibits a super-Nernst response (62.88 mV/pH) in the range of pH 1.92–11.74. The patterned micro Pt film is used as the temperature sensor, and the three-wire orthogonal structure is used for temperature detection. The sensitivity of this temperature sensor is 5.517 [Formula: see text]/[Formula: see text]C in the range of 6 to 80[Formula: see text]C. Conductivity was measured by a four-electrode system, and the electrode constant was 1.667 cm[Formula: see text] measured between 0.994 and 21.167 mS/cm. The test results show that the multi-parameter integrated chip system can realize the simultaneous detection of pH, temperature and conductivity in water, and has the characteristics of miniaturization and low cost, and provides an effective way for simultaneous detection of water quality.
Simultaneous Detection of Multiple Surface Acoustic Wave Sensor-Tags for Water Quality Monitoring utilizing Cellular Code-Reuse Approach
