The effect of thickness on the properties of heavily Al-doped ZnO films by simultaneous rf and dc magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2003.08.002 ◽

2004 ◽

Vol 30 (4) ◽

pp. 497-501 ◽

Author(s):

Su-Shia Lin ◽

Jow-Lay Huang

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

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Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2012.12213 ◽

2013 ◽

Vol 27 (10) ◽

pp. 1112-1116 ◽

Author(s):

Ke-Wei SUN ◽

Wan-Cheng ZHOU ◽

Shan-Shan HUANG ◽

Xiu-Feng TANG

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno ◽

Sputtering Pressure

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Process control for low temperature reactive deposition of Al doped ZnO films by ICP-assisted DC magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.02.207 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 862-866 ◽

Author(s):

S.J. Jung ◽

B.M. Koo ◽

Y.H. Han ◽

J.J. Lee ◽

J.H. Joo

Keyword(s):

Low Temperature ◽

Process Control ◽

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Reactive Deposition ◽

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Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target

Vacuum ◽

10.1016/j.vacuum.2012.03.002 ◽

2012 ◽

Vol 86 (10) ◽

pp. 1423-1427 ◽

Author(s):

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Hong-Man Moon ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Photovoltaic Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Characterization of AI-doped ZnO Films Deposited by DC Magnetron Sputtering

Journal of the Korean institute of surface engineering ◽

10.5695/jkise.2007.40.3.107 ◽

2007 ◽

Vol 40 (3) ◽

pp. 107-112 ◽

Author(s):

Yi-Seop Park ◽

Seung-Ho Lee ◽

Pung-Keun Song

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

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Effect of deposition time on the properties of Al doped ZnO films prepared by DC magnetron sputtering

10.1063/1.4980514 ◽

2017 ◽

Author(s):

Ganesh R. Bhand ◽

Nitu Motwani ◽

Nandu B. Chaure

Keyword(s):

Magnetron Sputtering ◽

Deposition Time ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

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Effect of organic-buffer-layer on electrical property and environmental reliability of Ga-doped ZnO films prepared by RF plasma assisted DC magnetron sputtering on plastic substrate

Thin Solid Films ◽

10.1016/j.tsf.2010.08.158 ◽

2010 ◽

Vol 519 (5) ◽

pp. 1525-1529 ◽

Author(s):

Toshio Hinoki ◽

Chika Kyuhara ◽

Hideaki Agura ◽

Kenji Yazawa ◽

Kentaro Kinoshita ◽

...

Keyword(s):

Electrical Property ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Plastic Substrate ◽

Rf Plasma ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

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Effect of substrate temperature on the properties of Ti-doped ZnO films by simultaneous rf and dc magnetron sputtering

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2004.08.040 ◽

2005 ◽

Vol 90 (1) ◽

pp. 22-30 ◽

Author(s):

Su-Shia Lin ◽

Jow-Lay Huang ◽

Ding-Fwu Lii

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

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Characteristic of Ga-Doped ZnO Films Deposited by DC Magnetron Sputtering with a Sintered Ceramic ZnO:Ga Target

Journal of the Korean Physical Society ◽

10.3938/jkps.53.416 ◽

2008 ◽

Vol 53 (1) ◽

pp. 416-420 ◽

Author(s):

Jung-Chul Lee ◽

Yang-Do Kim ◽

Pung-Keun Song ◽

Jin-Ho Lee ◽

Young-Seok Kim ◽

...

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Sintered Ceramic ◽

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Electrical and structural properties of In-doped ZnO films deposited by RF superimposed DC magnetron sputtering system

Journal of Physics and Chemistry of Solids ◽

10.1016/j.jpcs.2009.12.062 ◽

2010 ◽

Vol 71 (4) ◽

pp. 669-672 ◽

Author(s):

Ji Bong Park ◽

Se Hun Park ◽

Pung Keun Song

Keyword(s):

Magnetron Sputtering ◽

Structural Properties ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno ◽

Sputtering System

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Effects of substrate heating and vacuum annealing on optical and electrical properties of alumina-doped ZnO films deposited by DC magnetron sputtering

10.1117/12.892270 ◽

2011 ◽

Author(s):

Chien-Jen Tang ◽

Chun-Yuan Wang ◽

Cheng-Chung Jaing

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Vacuum Annealing ◽

Zno Films ◽

Optical And Electrical Properties ◽

Dc Magnetron Sputtering ◽

Substrate Heating ◽

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