Effect of organic-buffer-layer on electrical property and environmental reliability of Ga-doped ZnO films prepared by RF plasma assisted DC magnetron sputtering on plastic substrate

2010 ◽  
Vol 519 (5) ◽  
pp. 1525-1529 ◽  
Author(s):  
Toshio Hinoki ◽  
Chika Kyuhara ◽  
Hideaki Agura ◽  
Kenji Yazawa ◽  
Kentaro Kinoshita ◽  
...  
Keyword(s):  
Electrical Property ◽  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Plastic Substrate ◽  
Rf Plasma ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

2013 ◽  
Vol 27 (10) ◽  
pp. 1112-1116 ◽  
Author(s):  
Ke-Wei SUN ◽  
Wan-Cheng ZHOU ◽  
Shan-Shan HUANG ◽  
Xiu-Feng TANG
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Sputtering Pressure

Al-doped ZnO films deposited on a slightly reduced buffer layer by reactive dc unbalanced magnetron sputtering

2014 ◽  
Vol 555 ◽  
pp. 93-99 ◽  
Author(s):  
Minehide Kusayanagi ◽  
Azusa Uchida ◽  
Nobuto Oka ◽  
Junjun Jia ◽  
Shin-ichi Nakamura ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Zno Films ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Doped Zno

Characteristic of Ga-Doped ZnO Films Deposited by DC Magnetron Sputtering with a Sintered Ceramic ZnO:Ga Target

2008 ◽  
Vol 53 (1) ◽  
pp. 416-420 ◽  
Author(s):  
Jung-Chul Lee ◽  
Yang-Do Kim ◽  
Pung-Keun Song ◽  
Jin-Ho Lee ◽  
Young-Seok Kim ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Sintered Ceramic ◽  
Doped Zno
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