Effects of substrate heating and vacuum annealing on optical and electrical properties of alumina-doped ZnO films deposited by DC magnetron sputtering

2011 ◽  
Author(s):  
Chien-Jen Tang ◽  
Chun-Yuan Wang ◽  
Cheng-Chung Jaing
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Vacuum Annealing ◽  
Zno Films ◽  
Optical And Electrical Properties ◽  
Dc Magnetron Sputtering ◽  
Substrate Heating ◽  
Doped Zno

Microstructural, Optical and Electrical Properties of Molybdenum Doped ZnO Films Deposited by Magnetron Sputtering

2012 ◽  
Vol 4 (2) ◽  
pp. 193-198 ◽  
Author(s):  
Shiwei Shi ◽  
Gang He ◽  
Miao Zhang ◽  
Xueping Song ◽  
Junlei Li ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Zno Films ◽  
Optical And Electrical Properties ◽  
Doped Zno

Mechanical and Electrical Properties of Ga-Doped ZnO Films Deposited on Flexible Substrate by DC Magnetron Sputtering

2008 ◽  
Vol 569 ◽  
pp. 185-188
Author(s):  
Dong Yeop Lee ◽  
Jung Rak Lee ◽  
Do Geun Kim ◽  
Gun Hwan Lee ◽  
Young Seok Kim ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Flexible Substrate ◽  
Bending Test ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Substrate Heating ◽  
Mechanical And Electrical Properties ◽  
Doped Zno ◽  
Pet Substrate ◽  
Gas Pressures

Ga-doped ZnO films were deposited on polyethylene terephthalate (PET) substrate by dc magnetron sputtering using a high density GZO target (doped with 6.65 wt% Ga2O3) without substrate heating. We investigated electrical, structural, and mechanical properties of GZO films deposited under various total gas pressures (Ptot). GZO films deposited at Ptot of 2.0 Pa showed the lowest resistivity (2.91 x 10-2 7cm), which could be attributed to higher crystallinity of the film. Also, this GZO film showed the lowest change in resistance (8 R/R0 = 0.3) for the dynamic bending test.

Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

2013 ◽  
Vol 27 (10) ◽  
pp. 1112-1116 ◽  
Author(s):  
Ke-Wei SUN ◽  
Wan-Cheng ZHOU ◽  
Shan-Shan HUANG ◽  
Xiu-Feng TANG
Keyword(s):  
Magnetron Sputtering ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Doped Zno ◽  
Sputtering Pressure
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