Multiscale modeling and neural network model based control of a plasma etch process

2020 ◽  
Vol 164 ◽  
pp. 113-124
Author(s):  
Tianqi Xiao ◽  
Dong Ni
2007 ◽  
Author(s):  
Jacek Czarnigowski ◽  
Mirosław Wendeker ◽  
Piotr Jakliński ◽  
Pierre Boulet ◽  
Florin Breaban

Author(s):  
Olga Uvarova ◽  
Sergey Uvarov

The paper considers a mechanism for constructing a model based on artificial neural network for obtaining the values of the cohesive energy of a system of atoms. Cohesive energy allows for calculation of total energy of system. It is one of the most important characteristics of a structure. A computational experiment is carried out for one-component crystal structures of Si, Ge and C.


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