Influence of RF PACVD process parameters of diamond-like carbon films on optical properties and nano-hardness of the films
2008 ◽
Vol 17
(7-10)
◽
pp. 1655-1659
◽
2015 ◽
Vol 45
(9)
◽
pp. 1434-1438
◽
Keyword(s):
2008 ◽
Vol 11
(4)
◽
pp. 396-399
Keyword(s):
2013 ◽
Vol 660
◽
pp. 47-50
◽
Keyword(s):
2005 ◽
Vol 59
(11)
◽
pp. 1417-1421
◽