Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology

2015 ◽  
Vol 58 ◽  
pp. 172-179 ◽  
Author(s):  
V. Podgursky ◽  
A. Bogatov ◽  
V. Sedov ◽  
I. Sildos ◽  
A. Mere ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Surface Morphology ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Growth Dynamics ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Scaling Analysis ◽  
Nanocrystalline Diamond Films

Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

2021 ◽  
Vol 55 (1) ◽  
pp. 66-75
Author(s):  
A. L. Vikharev ◽  
S. A. Bogdanov ◽  
N. M. Ovechkin ◽  
O. A. Ivanov ◽  
D. B. Radishev ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Nanocrystalline Diamond ◽  
Nanocrystalline Diamond Films
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