Anodically bondable Low Temperature Co-Fired Ceramic (LTCC) based Fabry-Pérot Interferometer (FPI) pressure sensor design

Optik ◽  
2021 ◽  
Vol 247 ◽  
pp. 167755
Author(s):  
Fikret YILDIZ
2019 ◽  
Vol 2019 ◽  
pp. 1-7 ◽  
Author(s):  
Huixin Zhang ◽  
Jia Liu ◽  
Jiashun Li ◽  
Pinggang Jia ◽  
Fei Feng ◽  
...  

A novel all-silica fiber optic Fabry-Perot (FP) pressure sensor with pressure leading-in tube based on microbubble structure is developed and experimentally demonstrated. The FP cavity is formed by fixing the end face of the single-mode fiber (SMF) parallel to the outer surface of the microbubble, in which the microbubble with a diameter of about 318 μm is constructed at the end of silica hollow tube. When external pressure is transmitted on the inner surface of the microbubble by the pressure leading-in tube, the FP cavity length changes with the diameter of microbubble. Experimental results show that such a sensor has a linear sensitivity of approximately 4.84 nm/MPa at room temperature over the pressure range of 1.1 MPa; the sensor has a very low temperature coefficient of approximately 2 pm/°C from room temperature to 600°C. The sensor has advantages of extremely low temperature coefficient, compact structure, and small size, which has potential applications for measuring pressure in high-temperature environment.


2018 ◽  
Vol 57 (15) ◽  
pp. 4211 ◽  
Author(s):  
Jia Liu ◽  
Pinggang Jia ◽  
Huixin Zhang ◽  
Xiaodan Tian ◽  
Hao Liang ◽  
...  

Author(s):  
FRANCISCO ARTHUR BONFIM AZEVEDO ◽  
Daniela Vacarini de Faria ◽  
Marcos Maximo ◽  
Mauricio Donadon

2000 ◽  
Author(s):  
Zhiquan Li ◽  
Lina Fan ◽  
Xifu Qiang
Keyword(s):  

2012 ◽  
Author(s):  
Jun Ma ◽  
Wei Jin ◽  
Hoi Lut Ho
Keyword(s):  

2016 ◽  
Vol 8 (5) ◽  
pp. 1-8 ◽  
Author(s):  
Jia Shi ◽  
Yuye Wang ◽  
Degang Xu ◽  
Yixin He ◽  
Junfeng Jiang ◽  
...  

Author(s):  
Srikanth M. Kannapan ◽  
Dean L. Taylor

Abstract Naive interpretations of concurrent engineering may expect extreme parallelization of tasks and simultaneous accommodation of multiple perspectives. In fact, from our efforts at modeling tasks in a MEMS (Micro-Electro-Mechanical Systems) pressure sensor design project, it appears that data dependencies due to the structure of tasks and the product itself result in scenarios of decision and action that must be carefully coordinated. This paper refines a previously described information model for defining evolving contexts of product model aspects and team member perspectives, with software agents acting on behalf of team members to execute tasks. The pressure sensor design project is analyzed in the framework of the information model. A scenario of decision and action for design of the pressure sensor is modeled as a design process plan. Conflict on a shared parameter occurs as a consequence of introducing some parallelism between the capacitance and deflection agents in the process. We present a technique for negotiating such conflicts by definition and propagation of utility functions on decision parameters and axiomatic negotiation.


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