In situ growth of lead zirconate titanate thin films by hybrid process: sol–gel method and pulsed-laser deposition

2005 ◽  
Vol 53 (3) ◽  
pp. 593-600 ◽  
Author(s):  
Z.J. Wang ◽  
H. Kokawa ◽  
R. Maeda
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Pulsed Laser ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
In Situ Growth ◽  
Gel Method

Substrate Effects in In-Situ Growth of Perovskites by Pulsed Laser Deposition

1991 ◽  
Vol 243 ◽  
Author(s):  
K. F. Etzold ◽  
R. A. Roy ◽  
K. L. Saenger
Keyword(s):  
Pulsed Laser Deposition ◽  
Lead Zirconate Titanate ◽  
Elevated Temperatures ◽  
Pulsed Laser ◽  
Interface Layer ◽  
Dielectric Constants ◽  
Laser Deposition ◽  
In Situ Growth ◽  
Substrate Dependence

AbstractIn this study we report on in-situ growth of lead zirconate titanate (PbZr1-xTixO3, PZT) and strontium titanate (SrTiO3, STO) films by pulsed laser deposition at 248 nm. Films were deposited in an oxygen background at elevated temperatures on a variety of substrates including MgO(l00), Pt(100)/MgO(100), Pt(111)/MgO(111), Pt(110)/MgO(110), Pt(111)/SiO2/Si, and Pt(111)/glass.Deposited films were characterized by Rutherford Backscattering Spectroscopy (RBS), x-ray diffraction (XRD), and electrical (dielectric constant and leakage) measurements. A strong substrate dependence was found for both the fraction of pyrochlore (Pb2Zr2-xTixO7) phase in the PZT films, and the STO film dielectric constants. The origin of the substrate dependence is discussed with regard to nucleation and interface layer cffects, and the chemistry of the relevant materials.

Role of the oxygen plasma during in situ growth of YBa2Cu3O6+x thin films by pulsed laser deposition

1998 ◽  
Vol 307 (3-4) ◽  
pp. 298-306 ◽  
Author(s):  
J. Garcı́a López ◽  
D.H.A. Blank ◽  
H. Rogalla ◽  
J. Siejka
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Oxygen Plasma ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
In Situ Growth
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