Carbon nitride film deposition by active screen plasma nitriding

2011 ◽  
Vol 65 (19-20) ◽  
pp. 2985-2988 ◽  
Author(s):  
Ângela E. Crespi ◽  
Marcelo E.H. Maia da Costa ◽  
Carlos A. Figueroa ◽  
Marta E.R. Dotto ◽  
Alan P. Kauling ◽  
...  
Keyword(s):  
Carbon Nitride ◽  
Plasma Nitriding ◽  
Film Deposition ◽  
Nitride Film ◽  
Active Screen Plasma Nitriding ◽  
Carbon Nitride Film ◽  
Active Screen

The use of a biomolecular target for crystalline carbon nitride film deposition by Ar ion-beam sputtering without any other source of nitrogen

1998 ◽  
Vol 72 (26) ◽  
pp. 3449-3451 ◽  
Author(s):  
L. C. Chen ◽  
T. R. Lu ◽  
C. T. Kuo ◽  
D. M. Bhusari ◽  
J. J. Wu ◽  
...  
Keyword(s):  
Carbon Nitride ◽  
Ion Beam ◽  
Film Deposition ◽  
Nitride Film ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Carbon Nitride Film

Preparation of a novel target material for carbon nitride film deposition

1997 ◽  
Vol 308-309 ◽  
pp. 126-129 ◽  
Author(s):  
Tien-Rong Lu ◽  
Cheng-Tzu Kuo ◽  
Teng-Ming Chen
Keyword(s):  
Carbon Nitride ◽  
Target Material ◽  
Film Deposition ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Novel Target

scholarly journals CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

Sensors ◽  
2008 ◽  
Vol 8 (4) ◽  
pp. 2662-2672 ◽  
Author(s):  
Sung Lee ◽  
Ji Lee ◽  
Shaestagir Chowdhury
Keyword(s):  
Carbon Nitride ◽  
Humidity Sensor ◽  
Sensor System ◽  
Nitride Film ◽  
Carbon Nitride Film
Sign in / Sign up

Export Citation Format

Share Document