scholarly journals CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

Sensors ◽  
2008 ◽  
Vol 8 (4) ◽  
pp. 2662-2672 ◽  
Author(s):  
Sung Lee ◽  
Ji Lee ◽  
Shaestagir Chowdhury
Keyword(s):  
Carbon Nitride ◽  
Humidity Sensor ◽  
Sensor System ◽  
Nitride Film ◽  
Carbon Nitride Film

Characterization of boron carbon nitride film for humidity sensor

2007 ◽  
Vol 16 (4-7) ◽  
pp. 1300-1303 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Hidekazu Shima ◽  
Chiharu Kimura ◽  
Takashi Sugino
Keyword(s):  
Carbon Nitride ◽  
Humidity Sensor ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Boron Carbon

Nano-Structured Carbon Nitride Films for Microsensor Applications

2007 ◽  
Vol 121-123 ◽  
pp. 1199-1202 ◽  
Author(s):  
J.G. Lee ◽  
S.P. Lee
Keyword(s):  
Carbon Nitride ◽  
Humidity Sensor ◽  
Nitride Film ◽  
Sensor Material ◽  
Carbon Nitride Film ◽  
Relative Humidity Range ◽  
Semiconductor Fabrication ◽  
Magnetron Sputter ◽  
Lift Off ◽  
Humidity Range

Nano-structured carbon nitride film, which is a new sensor material, has been prepared by facing target magnetron sputter for microsensor applications. Surface morphology, surface roughness and bonding structures of the films were investigated by EDS, SEM, AFM and FTIR spectroscopy. The growth rate of film is about 2.2 um/hr, and grain size and RMS roughness are about 320 nm and 0.9 nm, respectively. The impedance of micro-humidity-sensor, which was fabricated by the conventional semiconductor fabrication process including lift-off technique, changed 95.4 kΩ to 2 kΩ in the relative humidity range of 5 % to 95 %.

scholarly journals Facile assembly of a graphitic carbon nitride film at an air/water interface for photoelectrochemical NADH regeneration

2020 ◽  
Vol 7 (13) ◽  
pp. 2434-2442 ◽  
Author(s):  
Changchao Jia ◽  
Wenjuan Hu ◽  
Yuanyuan Zhang ◽  
Chao Teng ◽  
Zupeng Chen ◽  
...  
Keyword(s):  
Self Assembly ◽  
Carbon Nitride ◽  
Graphitic Carbon ◽  
Graphitic Carbon Nitride ◽  
Nitride Film ◽  
Water Interface ◽  
Film Electrode ◽  
Nadh Regeneration ◽  
Air Water Interface ◽  
Carbon Nitride Film

A graphitic carbon nitride film electrode could be assembled at an air/water interface from nanosheets which exhibits improved photoelectrochemical coenzyme regeneration by further coupling with graphene during the interfacial self-assembly.

Improvement of orthodontic friction by coating archwire with carbon nitride film

2011 ◽  
Vol 257 (24) ◽  
pp. 10333-10337 ◽  
Author(s):  
Songbo Wei ◽  
Tianmin Shao ◽  
Peng Ding
Keyword(s):  
Carbon Nitride ◽  
Nitride Film ◽  
Carbon Nitride Film

Boron carbon nitride film containing hydrogen for 2nm node low-k interconnection

2009 ◽  
Author(s):  
Hidemitsu Aoki ◽  
Takuroh Masuzumi ◽  
Makoto Hara ◽  
Daisuke Watanabe ◽  
Chiharu Kimura ◽  
...  
Keyword(s):  
Carbon Nitride ◽  
Nitride Film ◽  
Carbon Nitride Film ◽  
Boron Carbon Nitride ◽  
Low K ◽  
Boron Carbon
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