The investigation of the antireflection method and laser induced damage properties for perfluoroalkoxy copolymer film as short pulse laser debris shields

2021 ◽  
pp. 131601
Author(s):  
Minglong Zhong ◽  
Laixi Sun ◽  
Qinghua Deng ◽  
Zhiqing Wu ◽  
Chaoyang Wang ◽  
...  
Keyword(s):  
Pulse Laser ◽  
Short Pulse ◽  
Copolymer Film ◽  
Short Pulse Laser ◽  
Laser Induced Damage

Temperature dependence of laser-induced damage thresholds by short pulse laser

2012 ◽  
Author(s):  
Katsuhiro Mikami ◽  
Shinji Motokoshi ◽  
Toshihiro Somekawa ◽  
Takahisa Jitsuno ◽  
Masayuki Fujita ◽  
...  
Keyword(s):  
Temperature Dependence ◽  
Pulse Laser ◽  
Short Pulse ◽  
Short Pulse Laser ◽  
Laser Induced Damage

Silicon Thinning using Ultra-Short Pulse Laser Ablation

2004 ◽  
Author(s):  
F. Beaudoin ◽  
P. Perdu ◽  
C. DeNardi ◽  
R. Desplats ◽  
J. Lopez ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Sample Preparation ◽  
Pulse Laser ◽  
Pulse Laser Ablation ◽  
Short Pulse ◽  
Special Care ◽  
Short Pulse Laser ◽  
Ultra Short Pulse ◽  
Ultra Short Pulse Laser

Abstract Ultra-short pulse laser ablation is applied to IC backside sample preparation. It is contact-less, non-thermal, precise and can ablate the various types of material present in IC packages. This study concerns the optimization of ultra-short pulse laser ablation for silicon thinning. Uncontrolled silicon roughness and poor uniformity of the laser thinned cavity needed to be tackled. Special care is taken to minimize the silicon RMS roughness to less than 1µm. Application to sample preparation of 256Mbit devices is presented.

Chromium oxide dissolution in steels via short pulse laser processing

2013 ◽  
Vol 115 (4) ◽  
pp. 1469-1477 ◽  
Author(s):  
Evgeny Kharanzhevskiy ◽  
Sergey Reshetnikov
Keyword(s):  
Pulse Laser ◽  
Chromium Oxide ◽  
Laser Processing ◽  
Short Pulse ◽  
Oxide Dissolution ◽  
Short Pulse Laser
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